FR2473168B2 - Capteur differentiel lineaire a courants de foucault servant a mesurer les petits deplacements d'une piece metallique - Google Patents

Capteur differentiel lineaire a courants de foucault servant a mesurer les petits deplacements d'une piece metallique

Info

Publication number
FR2473168B2
FR2473168B2 FR8000451A FR8000451A FR2473168B2 FR 2473168 B2 FR2473168 B2 FR 2473168B2 FR 8000451 A FR8000451 A FR 8000451A FR 8000451 A FR8000451 A FR 8000451A FR 2473168 B2 FR2473168 B2 FR 2473168B2
Authority
FR
France
Prior art keywords
metal part
differential sensor
linear differential
small displacements
current linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8000451A
Other languages
English (en)
Other versions
FR2473168A2 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EFFA ETUDES
Original Assignee
EFFA ETUDES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EFFA ETUDES filed Critical EFFA ETUDES
Priority to FR8000451A priority Critical patent/FR2473168B2/fr
Publication of FR2473168A2 publication Critical patent/FR2473168A2/fr
Application granted granted Critical
Publication of FR2473168B2 publication Critical patent/FR2473168B2/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FR8000451A 1980-01-07 1980-01-07 Capteur differentiel lineaire a courants de foucault servant a mesurer les petits deplacements d'une piece metallique Expired FR2473168B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8000451A FR2473168B2 (fr) 1980-01-07 1980-01-07 Capteur differentiel lineaire a courants de foucault servant a mesurer les petits deplacements d'une piece metallique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8000451A FR2473168B2 (fr) 1980-01-07 1980-01-07 Capteur differentiel lineaire a courants de foucault servant a mesurer les petits deplacements d'une piece metallique

Publications (2)

Publication Number Publication Date
FR2473168A2 FR2473168A2 (fr) 1981-07-10
FR2473168B2 true FR2473168B2 (fr) 1985-07-12

Family

ID=9237395

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8000451A Expired FR2473168B2 (fr) 1980-01-07 1980-01-07 Capteur differentiel lineaire a courants de foucault servant a mesurer les petits deplacements d'une piece metallique

Country Status (1)

Country Link
FR (1) FR2473168B2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3666977D1 (en) * 1985-06-14 1989-12-21 Fernand Humblet Displacement detector
US7112960B2 (en) 2003-07-31 2006-09-26 Applied Materials, Inc. Eddy current system for in-situ profile measurement
WO2010056769A2 (fr) 2008-11-14 2010-05-20 Applied Materials, Inc. Capteur à courants de foucault avec résolution de bord améliorée
WO2018080764A1 (fr) 2016-10-28 2018-05-03 Applied Materials, Inc. Configuration de noyau à montants alternés pour système de surveillance d'induction électromagnétique in situ

Also Published As

Publication number Publication date
FR2473168A2 (fr) 1981-07-10

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