FR2449051B1 - - Google Patents
Info
- Publication number
- FR2449051B1 FR2449051B1 FR8003407A FR8003407A FR2449051B1 FR 2449051 B1 FR2449051 B1 FR 2449051B1 FR 8003407 A FR8003407 A FR 8003407A FR 8003407 A FR8003407 A FR 8003407A FR 2449051 B1 FR2449051 B1 FR 2449051B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G25/00—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement
- B65G25/02—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having different forward and return paths of movement, e.g. walking beam conveyors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Reciprocating Conveyors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/012,354 US4275978A (en) | 1979-02-15 | 1979-02-15 | Transport apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2449051A1 FR2449051A1 (fr) | 1980-09-12 |
| FR2449051B1 true FR2449051B1 (US06649357-20031118-C00005.png) | 1984-04-20 |
Family
ID=21754574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8003407A Granted FR2449051A1 (fr) | 1979-02-15 | 1980-02-15 | Appareil de transport |
Country Status (5)
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4692695A (en) * | 1982-05-18 | 1987-09-08 | Ade Corporation | Conductivity-type sensor |
| US4646009A (en) * | 1982-05-18 | 1987-02-24 | Ade Corporation | Contacts for conductivity-type sensors |
| US4498832A (en) * | 1982-05-21 | 1985-02-12 | The Boc Group, Inc. | Workpiece accumulating and transporting apparatus |
| WO1984003196A1 (en) * | 1983-02-14 | 1984-08-16 | Brooks Ass | Articulated arm transfer device |
| US4666366A (en) * | 1983-02-14 | 1987-05-19 | Canon Kabushiki Kaisha | Articulated arm transfer device |
| US4909695A (en) * | 1986-04-04 | 1990-03-20 | Materials Research Corporation | Method and apparatus for handling and processing wafer-like materials |
| US4794863A (en) * | 1988-03-21 | 1989-01-03 | International Business Machines Corporation | Motive structure for transporting workpieces |
| US5197812A (en) * | 1989-11-09 | 1993-03-30 | Dataproducts Corporation | High accuracy vacuum belt and pinch roller media transport mechanism |
| US5664664A (en) * | 1994-12-28 | 1997-09-09 | U.S. Vibra, Inc. | Magnetic vibrator sub-assembly for vibratory feed devices |
| EP0866742A4 (en) * | 1995-12-15 | 1999-03-03 | Brooks Automation Inc | HANDLING DEVICE WITH ARM-ARMED ARM |
| US5765983A (en) * | 1996-05-30 | 1998-06-16 | Brooks Automation, Inc. | Robot handling apparatus |
| US6123502A (en) * | 1997-07-08 | 2000-09-26 | Brooks Automation, Inc. | Substrate holder having vacuum holding and gravity holding |
| US6105753A (en) * | 1997-08-14 | 2000-08-22 | Graham; S. Neal | Linear vibratory parts feeder |
| US20040091344A1 (en) * | 2002-11-12 | 2004-05-13 | Innovative Steel Products, Inc. | Lifting and moving apparatus for a vehicle bed |
| US7004306B2 (en) * | 2002-12-19 | 2006-02-28 | Fmc Technologies, Inc. | Conveying apparatus with piezoelectric driver |
| US20070269297A1 (en) | 2003-11-10 | 2007-11-22 | Meulen Peter V D | Semiconductor wafer handling and transport |
| US7458763B2 (en) | 2003-11-10 | 2008-12-02 | Blueshift Technologies, Inc. | Mid-entry load lock for semiconductor handling system |
| WO2005048313A2 (en) | 2003-11-10 | 2005-05-26 | Blueshift Technologies, Inc. | Methods and systems for handling workpieces in a vacuum-based semiconductor handling system |
| US10086511B2 (en) | 2003-11-10 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor manufacturing systems |
| US10923374B1 (en) * | 2019-07-23 | 2021-02-16 | Applied Materials, Inc. | Walking beam chamber |
| DE102020106350B4 (de) * | 2020-03-09 | 2021-09-16 | IMA-TEC GmbH | Fördergerät |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE7716749U1 (US06649357-20031118-C00005.png) * | 1900-01-01 | Valentin, Otto, 7987 Weingarten | ||
| US2705070A (en) * | 1950-03-17 | 1955-03-29 | Carrier Conveyor Corp | Balanced conveyor |
| DE1176773B (de) * | 1954-03-29 | 1964-08-27 | Deutsche Edelstahlwerke Ag | Vorrichtung zum Hindurchfoerdern von Werk-stuecken durch einen Induktor |
| US2951581A (en) * | 1959-06-09 | 1960-09-06 | Gen Mills Inc | Vibratory conveyors |
| US3973665A (en) * | 1975-03-07 | 1976-08-10 | Gca Corporation | Article delivery and transport apparatus for evacuated processing equipment |
-
1979
- 1979-02-15 US US06/012,354 patent/US4275978A/en not_active Expired - Lifetime
-
1980
- 1980-02-12 WO PCT/US1980/000139 patent/WO1980001677A1/en active Application Filing
- 1980-02-12 DE DE3034339T patent/DE3034339C2/de not_active Expired
- 1980-02-15 FR FR8003407A patent/FR2449051A1/fr active Granted
- 1980-02-15 CA CA000345764A patent/CA1137914A/en not_active Expired
-
1982
- 1982-10-20 CA CA000413864A patent/CA1155079A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| WO1980001677A1 (en) | 1980-08-21 |
| US4275978A (en) | 1981-06-30 |
| DE3034339T1 (de) | 1982-08-26 |
| FR2449051A1 (fr) | 1980-09-12 |
| DE3034339C2 (de) | 1986-09-25 |
| CA1137914A (en) | 1982-12-21 |
| CA1155079A (en) | 1983-10-11 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |