FR2416549A1 - Diaphragme pour dispositif d'optique electronique - Google Patents

Diaphragme pour dispositif d'optique electronique

Info

Publication number
FR2416549A1
FR2416549A1 FR7803097A FR7803097A FR2416549A1 FR 2416549 A1 FR2416549 A1 FR 2416549A1 FR 7803097 A FR7803097 A FR 7803097A FR 7803097 A FR7803097 A FR 7803097A FR 2416549 A1 FR2416549 A1 FR 2416549A1
Authority
FR
France
Prior art keywords
electron beam
diaphragm
bars
metal ring
monocrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7803097A
Other languages
English (en)
French (fr)
Other versions
FR2416549B1 (OSRAM
Inventor
Emmanuel De Chambost
Jean-Claude Graffin
Jacques Trotel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7803097A priority Critical patent/FR2416549A1/fr
Publication of FR2416549A1 publication Critical patent/FR2416549A1/fr
Application granted granted Critical
Publication of FR2416549B1 publication Critical patent/FR2416549B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Beam Exposure (AREA)
FR7803097A 1978-02-03 1978-02-03 Diaphragme pour dispositif d'optique electronique Granted FR2416549A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7803097A FR2416549A1 (fr) 1978-02-03 1978-02-03 Diaphragme pour dispositif d'optique electronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7803097A FR2416549A1 (fr) 1978-02-03 1978-02-03 Diaphragme pour dispositif d'optique electronique

Publications (2)

Publication Number Publication Date
FR2416549A1 true FR2416549A1 (fr) 1979-08-31
FR2416549B1 FR2416549B1 (OSRAM) 1981-07-24

Family

ID=9204203

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7803097A Granted FR2416549A1 (fr) 1978-02-03 1978-02-03 Diaphragme pour dispositif d'optique electronique

Country Status (1)

Country Link
FR (1) FR2416549A1 (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR895838A (fr) * 1942-03-02 1945-02-05 Fides Gmbh Appareil à diffraction des électrons
FR2337420A1 (fr) * 1975-12-31 1977-07-29 Fujitsu Ltd Appareil lithographique a faisceau electronique

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR895838A (fr) * 1942-03-02 1945-02-05 Fides Gmbh Appareil à diffraction des électrons
FR2337420A1 (fr) * 1975-12-31 1977-07-29 Fujitsu Ltd Appareil lithographique a faisceau electronique

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NV8030/72 *

Also Published As

Publication number Publication date
FR2416549B1 (OSRAM) 1981-07-24

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Legal Events

Date Code Title Description
ST Notification of lapse