FR2416545B1 - - Google Patents
Info
- Publication number
- FR2416545B1 FR2416545B1 FR7803098A FR7803098A FR2416545B1 FR 2416545 B1 FR2416545 B1 FR 2416545B1 FR 7803098 A FR7803098 A FR 7803098A FR 7803098 A FR7803098 A FR 7803098A FR 2416545 B1 FR2416545 B1 FR 2416545B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7803098A FR2416545A1 (fr) | 1978-02-03 | 1978-02-03 | Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source |
| US06/007,895 US4214187A (en) | 1978-02-03 | 1979-01-30 | Ion source producing a dense flux of low energy ions |
| GB7903495A GB2017398B (en) | 1978-02-03 | 1979-02-01 | Ion source producing a dense flux of low energy ions |
| DE19792904049 DE2904049A1 (de) | 1978-02-03 | 1979-02-02 | Ionenquelle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7803098A FR2416545A1 (fr) | 1978-02-03 | 1978-02-03 | Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2416545A1 FR2416545A1 (fr) | 1979-08-31 |
| FR2416545B1 true FR2416545B1 (US08063081-20111122-C00115.png) | 1980-09-12 |
Family
ID=9204204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7803098A Granted FR2416545A1 (fr) | 1978-02-03 | 1978-02-03 | Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4214187A (US08063081-20111122-C00115.png) |
| DE (1) | DE2904049A1 (US08063081-20111122-C00115.png) |
| FR (1) | FR2416545A1 (US08063081-20111122-C00115.png) |
| GB (1) | GB2017398B (US08063081-20111122-C00115.png) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947421B2 (ja) * | 1980-03-24 | 1984-11-19 | 株式会社日立製作所 | マイクロ波イオン源 |
| US4471003A (en) * | 1980-11-25 | 1984-09-11 | Cann Gordon L | Magnetoplasmadynamic apparatus and process for the separation and deposition of materials |
| US4472174A (en) * | 1983-04-25 | 1984-09-18 | Raymond L. Chuan | Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation |
| GB2179492B (en) * | 1985-08-22 | 1989-11-29 | English Electric Valve Co Ltd | Thyratron arrangements |
| US4862032A (en) * | 1986-10-20 | 1989-08-29 | Kaufman Harold R | End-Hall ion source |
| CA2126251A1 (en) | 1994-02-18 | 1995-08-19 | Ronald Sinclair Nohr | Process of enhanced chemical bonding by electron beam radiation |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1209092A (fr) * | 1958-05-03 | 1960-02-29 | Commissariat Energie Atomique | Nouvelle source d'ions |
| FR1454051A (fr) * | 1965-08-20 | 1966-07-22 | Commissariat Energie Atomique | Source d'ions |
| US3476968A (en) * | 1966-12-19 | 1969-11-04 | Hitachi Ltd | Microwave ion source |
| US3634704A (en) * | 1970-09-02 | 1972-01-11 | Atomic Energy Commission | Apparatus for the production of highly stripped ions |
| JPS5148097A (en) * | 1974-10-23 | 1976-04-24 | Osaka Koon Denki Kk | Iongen |
-
1978
- 1978-02-03 FR FR7803098A patent/FR2416545A1/fr active Granted
-
1979
- 1979-01-30 US US06/007,895 patent/US4214187A/en not_active Expired - Lifetime
- 1979-02-01 GB GB7903495A patent/GB2017398B/en not_active Expired
- 1979-02-02 DE DE19792904049 patent/DE2904049A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| US4214187A (en) | 1980-07-22 |
| DE2904049A1 (de) | 1979-08-09 |
| GB2017398A (en) | 1979-10-03 |
| FR2416545A1 (fr) | 1979-08-31 |
| GB2017398B (en) | 1982-05-26 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CL | Concession to grant licences | ||
| ST | Notification of lapse |