FR2363882B1 - - Google Patents

Info

Publication number
FR2363882B1
FR2363882B1 FR7626376A FR7626376A FR2363882B1 FR 2363882 B1 FR2363882 B1 FR 2363882B1 FR 7626376 A FR7626376 A FR 7626376A FR 7626376 A FR7626376 A FR 7626376A FR 2363882 B1 FR2363882 B1 FR 2363882B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7626376A
Other languages
French (fr)
Other versions
FR2363882A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7626376A priority Critical patent/FR2363882A1/en
Publication of FR2363882A1 publication Critical patent/FR2363882A1/en
Application granted granted Critical
Publication of FR2363882B1 publication Critical patent/FR2363882B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
FR7626376A 1976-09-01 1976-09-01 Analyser for secondary ions produced by electron gun - has gun at angle to extraction lens in examination of insulators Granted FR2363882A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7626376A FR2363882A1 (en) 1976-09-01 1976-09-01 Analyser for secondary ions produced by electron gun - has gun at angle to extraction lens in examination of insulators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7626376A FR2363882A1 (en) 1976-09-01 1976-09-01 Analyser for secondary ions produced by electron gun - has gun at angle to extraction lens in examination of insulators

Publications (2)

Publication Number Publication Date
FR2363882A1 FR2363882A1 (en) 1978-03-31
FR2363882B1 true FR2363882B1 (en) 1979-03-02

Family

ID=9177307

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7626376A Granted FR2363882A1 (en) 1976-09-01 1976-09-01 Analyser for secondary ions produced by electron gun - has gun at angle to extraction lens in examination of insulators

Country Status (1)

Country Link
FR (1) FR2363882A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3403254A1 (en) * 1984-01-31 1985-08-01 Siemens AG, 1000 Berlin und 8000 München METHOD AND DEVICE FOR COMPENSATING CHARGES IN SECONDARY ISSUE MASS SPECTROMETRY (SIMS) ELECTRICALLY BAD CONDUCTING SAMPLES
US4639301B2 (en) * 1985-04-24 1999-05-04 Micrion Corp Focused ion beam processing
GB8609740D0 (en) * 1986-04-22 1986-05-29 Spectros Ltd Charged particle energy analyser
GB8703012D0 (en) * 1987-02-10 1987-03-18 Vg Instr Group Secondary ion mass spectrometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1349302A (en) * 1962-11-28 1964-01-17 Centre Nat Rech Scient Secondary ion emission microanalyzer

Also Published As

Publication number Publication date
FR2363882A1 (en) 1978-03-31

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Legal Events

Date Code Title Description
ST Notification of lapse