FR2358688B1 - - Google Patents
Info
- Publication number
- FR2358688B1 FR2358688B1 FR7621307A FR7621307A FR2358688B1 FR 2358688 B1 FR2358688 B1 FR 2358688B1 FR 7621307 A FR7621307 A FR 7621307A FR 7621307 A FR7621307 A FR 7621307A FR 2358688 B1 FR2358688 B1 FR 2358688B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7621307A FR2358688A1 (fr) | 1976-07-12 | 1976-07-12 | Procede de fabrication de masques photographiques transparents |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7621307A FR2358688A1 (fr) | 1976-07-12 | 1976-07-12 | Procede de fabrication de masques photographiques transparents |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2358688A1 FR2358688A1 (fr) | 1978-02-10 |
FR2358688B1 true FR2358688B1 (fr) | 1979-04-06 |
Family
ID=9175612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7621307A Granted FR2358688A1 (fr) | 1976-07-12 | 1976-07-12 | Procede de fabrication de masques photographiques transparents |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2358688A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0090924B1 (fr) * | 1982-04-05 | 1987-11-11 | International Business Machines Corporation | Procédé pour augmenter la résolution de l'image d'un photomasque et photomasque pour réaliser cette méthode |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1541299A (fr) * | 1966-10-20 | 1968-10-04 | Western Electric Co | Masques photolithographiques non réfléchissants et procédés de fabrication de ceux-ci |
-
1976
- 1976-07-12 FR FR7621307A patent/FR2358688A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2358688A1 (fr) | 1978-02-10 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |