FR2353650B1 - - Google Patents
Info
- Publication number
- FR2353650B1 FR2353650B1 FR7703518A FR7703518A FR2353650B1 FR 2353650 B1 FR2353650 B1 FR 2353650B1 FR 7703518 A FR7703518 A FR 7703518A FR 7703518 A FR7703518 A FR 7703518A FR 2353650 B1 FR2353650 B1 FR 2353650B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/691,917 US4036723A (en) | 1975-08-21 | 1976-06-01 | RF bias sputtering method for producing insulating films free of surface irregularities |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2353650A1 FR2353650A1 (fr) | 1977-12-30 |
FR2353650B1 true FR2353650B1 (es) | 1980-12-19 |
Family
ID=24778491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7703518A Granted FR2353650A1 (fr) | 1976-06-01 | 1977-02-01 | Procede de pulverisation cathodique hf avec polarisation du substrat et application de ce procede a la fabrication de tetes magnetiques |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2353650A1 (es) |
-
1977
- 1977-02-01 FR FR7703518A patent/FR2353650A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2353650A1 (fr) | 1977-12-30 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |