FR2353650B1 - - Google Patents

Info

Publication number
FR2353650B1
FR2353650B1 FR7703518A FR7703518A FR2353650B1 FR 2353650 B1 FR2353650 B1 FR 2353650B1 FR 7703518 A FR7703518 A FR 7703518A FR 7703518 A FR7703518 A FR 7703518A FR 2353650 B1 FR2353650 B1 FR 2353650B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7703518A
Other languages
French (fr)
Other versions
FR2353650A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/691,917 external-priority patent/US4036723A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2353650A1 publication Critical patent/FR2353650A1/en
Application granted granted Critical
Publication of FR2353650B1 publication Critical patent/FR2353650B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Magnetic Heads (AREA)
FR7703518A 1976-06-01 1977-02-01 Smooth electro-insulating layer formation on substrate - by high frequency cathodic sputtering in two stages Granted FR2353650A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/691,917 US4036723A (en) 1975-08-21 1976-06-01 RF bias sputtering method for producing insulating films free of surface irregularities

Publications (2)

Publication Number Publication Date
FR2353650A1 FR2353650A1 (en) 1977-12-30
FR2353650B1 true FR2353650B1 (en) 1980-12-19

Family

ID=24778491

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7703518A Granted FR2353650A1 (en) 1976-06-01 1977-02-01 Smooth electro-insulating layer formation on substrate - by high frequency cathodic sputtering in two stages

Country Status (1)

Country Link
FR (1) FR2353650A1 (en)

Also Published As

Publication number Publication date
FR2353650A1 (en) 1977-12-30

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Legal Events

Date Code Title Description
ST Notification of lapse