FR2351497B1 - - Google Patents

Info

Publication number
FR2351497B1
FR2351497B1 FR7614719A FR7614719A FR2351497B1 FR 2351497 B1 FR2351497 B1 FR 2351497B1 FR 7614719 A FR7614719 A FR 7614719A FR 7614719 A FR7614719 A FR 7614719A FR 2351497 B1 FR2351497 B1 FR 2351497B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7614719A
Other languages
French (fr)
Other versions
FR2351497A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7614719A priority Critical patent/FR2351497A1/fr
Priority to NLAANVRAGE7705207,A priority patent/NL177578C/xx
Priority to GB20082/77A priority patent/GB1570347A/en
Priority to SE7705531A priority patent/SE415309B/xx
Priority to DE19772721704 priority patent/DE2721704A1/de
Priority to US05/796,708 priority patent/US4110622A/en
Priority to CA278,403A priority patent/CA1085073A/en
Priority to JP5592077A priority patent/JPS538064A/ja
Publication of FR2351497A1 publication Critical patent/FR2351497A1/fr
Application granted granted Critical
Publication of FR2351497B1 publication Critical patent/FR2351497B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
FR7614719A 1976-05-14 1976-05-14 Dispositif permettant le trace programme de figures de formes differentes Granted FR2351497A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR7614719A FR2351497A1 (fr) 1976-05-14 1976-05-14 Dispositif permettant le trace programme de figures de formes differentes
NLAANVRAGE7705207,A NL177578C (nl) 1976-05-14 1977-05-11 Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel.
SE7705531A SE415309B (sv) 1976-05-14 1977-05-12 Anordning innefattande ett foremal som er paverkbart medelst korpuskularstralning
GB20082/77A GB1570347A (en) 1976-05-14 1977-05-12 Device which makes it possible to effect the programmed tracing of figures which have different shapes
DE19772721704 DE2721704A1 (de) 1976-05-14 1977-05-13 Korpuskularoptikvorrichtung
US05/796,708 US4110622A (en) 1976-05-14 1977-05-13 Device which makes it possible to effect the programmed tracing of figures which have different shapes
CA278,403A CA1085073A (en) 1976-05-14 1977-05-13 Device which makes it possible to effect the programmed tracing of figures which have different shapes
JP5592077A JPS538064A (en) 1976-05-14 1977-05-14 Particle optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7614719A FR2351497A1 (fr) 1976-05-14 1976-05-14 Dispositif permettant le trace programme de figures de formes differentes

Publications (2)

Publication Number Publication Date
FR2351497A1 FR2351497A1 (fr) 1977-12-09
FR2351497B1 true FR2351497B1 (US07696358-20100413-C00002.png) 1980-09-05

Family

ID=9173192

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7614719A Granted FR2351497A1 (fr) 1976-05-14 1976-05-14 Dispositif permettant le trace programme de figures de formes differentes

Country Status (1)

Country Link
FR (1) FR2351497A1 (US07696358-20100413-C00002.png)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1166766A (en) * 1977-02-23 1984-05-01 Hans C. Pfeiffer Method and apparatus for forming a variable size electron beam
GB1598219A (en) * 1977-08-10 1981-09-16 Ibm Electron beam system
DD134582A1 (de) * 1978-01-19 1979-03-07 Eberhard Hahn Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage
FR2513425A1 (fr) * 1981-09-22 1983-03-25 Thomson Csf Dispositif de limitation angulaire dans un systeme a faisceau de particules chargees
US4469950A (en) * 1982-03-04 1984-09-04 Varian Associates, Inc. Charged particle beam exposure system utilizing variable line scan

Also Published As

Publication number Publication date
FR2351497A1 (fr) 1977-12-09

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