FR2351497B1 - - Google Patents
Info
- Publication number
- FR2351497B1 FR2351497B1 FR7614719A FR7614719A FR2351497B1 FR 2351497 B1 FR2351497 B1 FR 2351497B1 FR 7614719 A FR7614719 A FR 7614719A FR 7614719 A FR7614719 A FR 7614719A FR 2351497 B1 FR2351497 B1 FR 2351497B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7614719A FR2351497A1 (fr) | 1976-05-14 | 1976-05-14 | Dispositif permettant le trace programme de figures de formes differentes |
NLAANVRAGE7705207,A NL177578C (nl) | 1976-05-14 | 1977-05-11 | Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel. |
SE7705531A SE415309B (sv) | 1976-05-14 | 1977-05-12 | Anordning innefattande ett foremal som er paverkbart medelst korpuskularstralning |
GB20082/77A GB1570347A (en) | 1976-05-14 | 1977-05-12 | Device which makes it possible to effect the programmed tracing of figures which have different shapes |
DE2721704A DE2721704C2 (de) | 1976-05-14 | 1977-05-13 | Korpuskularoptisches Gerät |
CA278,403A CA1085073A (en) | 1976-05-14 | 1977-05-13 | Device which makes it possible to effect the programmed tracing of figures which have different shapes |
US05/796,708 US4110622A (en) | 1976-05-14 | 1977-05-13 | Device which makes it possible to effect the programmed tracing of figures which have different shapes |
JP5592077A JPS538064A (en) | 1976-05-14 | 1977-05-14 | Particle optical device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7614719A FR2351497A1 (fr) | 1976-05-14 | 1976-05-14 | Dispositif permettant le trace programme de figures de formes differentes |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2351497A1 FR2351497A1 (fr) | 1977-12-09 |
FR2351497B1 true FR2351497B1 (US06650917-20031118-M00005.png) | 1980-09-05 |
Family
ID=9173192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7614719A Granted FR2351497A1 (fr) | 1976-05-14 | 1976-05-14 | Dispositif permettant le trace programme de figures de formes differentes |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2351497A1 (US06650917-20031118-M00005.png) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1166766A (en) * | 1977-02-23 | 1984-05-01 | Hans C. Pfeiffer | Method and apparatus for forming a variable size electron beam |
GB1598219A (en) * | 1977-08-10 | 1981-09-16 | Ibm | Electron beam system |
DD134582A1 (de) * | 1978-01-19 | 1979-03-07 | Eberhard Hahn | Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage |
FR2513425A1 (fr) * | 1981-09-22 | 1983-03-25 | Thomson Csf | Dispositif de limitation angulaire dans un systeme a faisceau de particules chargees |
US4469950A (en) * | 1982-03-04 | 1984-09-04 | Varian Associates, Inc. | Charged particle beam exposure system utilizing variable line scan |
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1976
- 1976-05-14 FR FR7614719A patent/FR2351497A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2351497A1 (fr) | 1977-12-09 |