FR2342000A1 - Procede et dispositif pour controler le comportement electrique d'une decharge luminescente de forte intensite - Google Patents

Procede et dispositif pour controler le comportement electrique d'une decharge luminescente de forte intensite

Info

Publication number
FR2342000A1
FR2342000A1 FR7703789A FR7703789A FR2342000A1 FR 2342000 A1 FR2342000 A1 FR 2342000A1 FR 7703789 A FR7703789 A FR 7703789A FR 7703789 A FR7703789 A FR 7703789A FR 2342000 A1 FR2342000 A1 FR 2342000A1
Authority
FR
France
Prior art keywords
monitoring
high intensity
electric behavior
luminescent discharge
luminescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7703789A
Other languages
English (en)
French (fr)
Other versions
FR2342000B1 (US06256357-20010703-M00001.png
Inventor
Werner Oppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IONIT ANSTALT BERNHARD BERGHAUS
Original Assignee
IONIT ANSTALT BERNHARD BERGHAUS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IONIT ANSTALT BERNHARD BERGHAUS filed Critical IONIT ANSTALT BERNHARD BERGHAUS
Publication of FR2342000A1 publication Critical patent/FR2342000A1/fr
Application granted granted Critical
Publication of FR2342000B1 publication Critical patent/FR2342000B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H1/00—Details of emergency protective circuit arrangements
    • H02H1/0007—Details of emergency protective circuit arrangements concerning the detecting means
    • H02H1/0015—Using arc detectors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H3/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
    • H02H3/08—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current
    • H02H3/10—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current additionally responsive to some other abnormal electrical conditions
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
    • H02H7/003—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electrostatic apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Discharge Heating (AREA)
  • Plasma Technology (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
FR7703789A 1976-02-18 1977-02-10 Procede et dispositif pour controler le comportement electrique d'une decharge luminescente de forte intensite Granted FR2342000A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2606395A DE2606395C3 (de) 1976-02-18 1976-02-18 Verfahren und Vorrichtung zur Überwachung des elektrischen Verhaltens einer stromstarken Glimmentladung

Publications (2)

Publication Number Publication Date
FR2342000A1 true FR2342000A1 (fr) 1977-09-16
FR2342000B1 FR2342000B1 (US06256357-20010703-M00001.png) 1980-04-18

Family

ID=5970147

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7703789A Granted FR2342000A1 (fr) 1976-02-18 1977-02-10 Procede et dispositif pour controler le comportement electrique d'une decharge luminescente de forte intensite

Country Status (9)

Country Link
US (1) US4193070A (US06256357-20010703-M00001.png)
JP (1) JPS5299935A (US06256357-20010703-M00001.png)
BR (1) BR7700947A (US06256357-20010703-M00001.png)
CA (1) CA1093435A (US06256357-20010703-M00001.png)
CH (1) CH611750A5 (US06256357-20010703-M00001.png)
DE (1) DE2606395C3 (US06256357-20010703-M00001.png)
FR (1) FR2342000A1 (US06256357-20010703-M00001.png)
GB (1) GB1575447A (US06256357-20010703-M00001.png)
IT (1) IT1077259B (US06256357-20010703-M00001.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2350761A1 (fr) * 1976-05-07 1977-12-02 Berghaus Ionit Anstalt Procede et dispositif pour la surveillance de decharges luminescentes de forte intensite
FR2442568A2 (fr) * 1978-11-27 1980-06-20 Bourboulon Henri Circuit d'alimentation protecteur pour lampes a decharge
FR2497038A1 (fr) * 1980-12-19 1982-06-25 Frager Jean Generateur de courant asservi en puissance, notamment pour processus de decharge dans une atmosphere rarefiee
EP0183230A2 (de) * 1984-11-26 1986-06-04 V M E I "Lenin" Verfahren und Vorrichtung zur Steuerung der chemisch-thermischen Behandlung von Werkstücken mittels Glimmentladung in einem Behandlungsgas

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5127967A (en) * 1987-09-04 1992-07-07 Surface Combustion, Inc. Ion carburizing
US4853046A (en) * 1987-09-04 1989-08-01 Surface Combustion, Inc. Ion carburizing
US5241152A (en) * 1990-03-23 1993-08-31 Anderson Glen L Circuit for detecting and diverting an electrical arc in a glow discharge apparatus
DE4326100B4 (de) * 1993-08-04 2006-03-23 Unaxis Deutschland Holding Gmbh Verfahren und Vorrichtung zum Beschichten von Substraten in einer Vakuumkammer, mit einer Einrichtung zur Erkennung und Unterdrückung von unerwünschten Lichtbögen
US7988833B2 (en) * 2002-04-12 2011-08-02 Schneider Electric USA, Inc. System and method for detecting non-cathode arcing in a plasma generation apparatus
US7981257B2 (en) * 2002-04-12 2011-07-19 Schneider Electric USA, Inc. Current-based method and apparatus for detecting and classifying arcs
EP2074643A1 (en) 2006-03-17 2009-07-01 Schneider Automation Inc. Current-based method and apparatus for detecting and classifying arcs
US20090308734A1 (en) * 2008-06-17 2009-12-17 Schneider Automation Inc. Apparatus and Method for Wafer Level Arc Detection
US10431428B2 (en) 2014-01-10 2019-10-01 Reno Technologies, Inc. System for providing variable capacitance
US9745660B2 (en) 2014-05-02 2017-08-29 Reno Technologies, Inc. Method for controlling a plasma chamber
DE102014213744A1 (de) * 2014-07-15 2016-01-21 Primetals Technologies Germany Gmbh Elektrischer Lichtbogenofen mit einer Sicherheitsvorrichtung und Verfahren zur Sicherung von Peripheriegeräten an elektrischen Lichtbogenöfen

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3564528A (en) * 1966-08-22 1971-02-16 Ex Cell O Corp Electronic control circuit
DE1275228B (de) * 1966-11-08 1968-08-14 Berghaus Elektrophysik Anst Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu
US3681662A (en) * 1970-10-23 1972-08-01 Berghaus Elektrophysik Anst Method of monitoring the electrical behavior of a high-intensity glow discharge for metallurgical processes
JPS4986926A (US06256357-20010703-M00001.png) * 1972-12-25 1974-08-20
US4034269A (en) * 1975-12-12 1977-07-05 General Electric Company Protective relay circuits

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2350761A1 (fr) * 1976-05-07 1977-12-02 Berghaus Ionit Anstalt Procede et dispositif pour la surveillance de decharges luminescentes de forte intensite
FR2442568A2 (fr) * 1978-11-27 1980-06-20 Bourboulon Henri Circuit d'alimentation protecteur pour lampes a decharge
FR2497038A1 (fr) * 1980-12-19 1982-06-25 Frager Jean Generateur de courant asservi en puissance, notamment pour processus de decharge dans une atmosphere rarefiee
EP0183230A2 (de) * 1984-11-26 1986-06-04 V M E I "Lenin" Verfahren und Vorrichtung zur Steuerung der chemisch-thermischen Behandlung von Werkstücken mittels Glimmentladung in einem Behandlungsgas
EP0183230A3 (en) * 1984-11-26 1987-02-04 V M E I "Lenin" Method and apparatus for controlling the chemical-thermal treatment of work pieces in a flow discharge

Also Published As

Publication number Publication date
FR2342000B1 (US06256357-20010703-M00001.png) 1980-04-18
DE2606395A1 (de) 1977-08-25
JPS5299935A (en) 1977-08-22
DE2606395C3 (de) 1979-01-18
DE2606395B2 (de) 1978-05-18
IT1077259B (it) 1985-05-04
CA1093435A (en) 1981-01-13
US4193070A (en) 1980-03-11
BR7700947A (pt) 1977-10-18
GB1575447A (en) 1980-09-24
JPS5622948B2 (US06256357-20010703-M00001.png) 1981-05-28
CH611750A5 (US06256357-20010703-M00001.png) 1979-06-15

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse