FR2339953B1 - - Google Patents
Info
- Publication number
- FR2339953B1 FR2339953B1 FR7603010A FR7603010A FR2339953B1 FR 2339953 B1 FR2339953 B1 FR 2339953B1 FR 7603010 A FR7603010 A FR 7603010A FR 7603010 A FR7603010 A FR 7603010A FR 2339953 B1 FR2339953 B1 FR 2339953B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
- H01L31/118—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation of the surface barrier or shallow PN junction detector type, e.g. surface barrier alpha-particle detectors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7603010A FR2339953A1 (fr) | 1976-01-29 | 1976-01-29 | Procede d'obtention de films minces en silicium de type n, de diodes a barriere de surface comportant de tels films, et detecteurs de particules comportant de telles diodes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7603010A FR2339953A1 (fr) | 1976-01-29 | 1976-01-29 | Procede d'obtention de films minces en silicium de type n, de diodes a barriere de surface comportant de tels films, et detecteurs de particules comportant de telles diodes |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2339953A1 FR2339953A1 (fr) | 1977-08-26 |
FR2339953B1 true FR2339953B1 (da) | 1979-07-20 |
Family
ID=9168723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7603010A Granted FR2339953A1 (fr) | 1976-01-29 | 1976-01-29 | Procede d'obtention de films minces en silicium de type n, de diodes a barriere de surface comportant de tels films, et detecteurs de particules comportant de telles diodes |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2339953A1 (da) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0296348B1 (de) * | 1987-05-27 | 1993-03-31 | Siemens Aktiengesellschaft | Ätzverfahren zum Erzeugen von Lochöffnungen oder Gräben in n-dotiertem Silizium |
DE4202454C1 (da) * | 1992-01-29 | 1993-07-29 | Siemens Ag, 8000 Muenchen, De |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2244259A1 (en) * | 1973-09-14 | 1975-04-11 | Siffert | Method of forming particle detectors - uses two rings to isolate substrate region during etching |
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1976
- 1976-01-29 FR FR7603010A patent/FR2339953A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2339953A1 (fr) | 1977-08-26 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |