FR2332516B1 - - Google Patents

Info

Publication number
FR2332516B1
FR2332516B1 FR7635113A FR7635113A FR2332516B1 FR 2332516 B1 FR2332516 B1 FR 2332516B1 FR 7635113 A FR7635113 A FR 7635113A FR 7635113 A FR7635113 A FR 7635113A FR 2332516 B1 FR2332516 B1 FR 2332516B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7635113A
Other languages
French (fr)
Other versions
FR2332516A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of FR2332516A1 publication Critical patent/FR2332516A1/fr
Application granted granted Critical
Publication of FR2332516B1 publication Critical patent/FR2332516B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR7635113A 1975-11-24 1976-11-22 Appareil pour la mesure interferometrique d'angles et de longueurs Granted FR2332516A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD189621A DD124673A1 (zh) 1975-11-24 1975-11-24

Publications (2)

Publication Number Publication Date
FR2332516A1 FR2332516A1 (fr) 1977-06-17
FR2332516B1 true FR2332516B1 (zh) 1980-03-21

Family

ID=5502484

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7635113A Granted FR2332516A1 (fr) 1975-11-24 1976-11-22 Appareil pour la mesure interferometrique d'angles et de longueurs

Country Status (6)

Country Link
CH (1) CH608098A5 (zh)
DD (1) DD124673A1 (zh)
DE (1) DE2650121A1 (zh)
FR (1) FR2332516A1 (zh)
HU (1) HU174659B (zh)
SU (1) SU721670A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4403152A (en) * 1981-05-18 1983-09-06 General Electric Company Optical fiber position sensor
SU1742615A1 (ru) * 1987-05-05 1992-06-23 Центральный научно-исследовательский геологоразведочный институт цветных и благородных металлов Способ контрол состо ни длинномерного объекта и устройство дл его осуществлени
SU1791757A2 (en) * 1987-10-30 1993-01-30 Tsni Geologorazvedochnyj I Tsv Method and device for controlling the state of a long-size object
RU1791703C (ru) * 1987-10-30 1993-01-30 Центральный научно-исследовательский геологоразведочный институт цветных и благородных металлов Способ контрол состо ни длинномерного объекта

Also Published As

Publication number Publication date
DE2650121A1 (de) 1977-06-02
CH608098A5 (en) 1978-12-15
HU174659B (hu) 1980-02-28
FR2332516A1 (fr) 1977-06-17
DD124673A1 (zh) 1977-03-09
SU721670A1 (ru) 1980-03-15

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Legal Events

Date Code Title Description
ST Notification of lapse