FR2326974B3 - - Google Patents
Info
- Publication number
- FR2326974B3 FR2326974B3 FR7629920A FR7629920A FR2326974B3 FR 2326974 B3 FR2326974 B3 FR 2326974B3 FR 7629920 A FR7629920 A FR 7629920A FR 7629920 A FR7629920 A FR 7629920A FR 2326974 B3 FR2326974 B3 FR 2326974B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
- C30B31/165—Diffusion sources
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/08—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state the diffusion materials being a compound of the elements to be diffused
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US62043975A | 1975-10-07 | 1975-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2326974A1 FR2326974A1 (fr) | 1977-05-06 |
| FR2326974B3 true FR2326974B3 (pl) | 1979-06-15 |
Family
ID=24485946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7629920A Granted FR2326974A1 (fr) | 1975-10-07 | 1976-10-05 | Procede de fabrication de semi-conducteurs par diffusion de gallium dans un tube ouvert |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5246763A (pl) |
| BE (1) | BE847005A (pl) |
| CA (1) | CA1065498A (pl) |
| DE (1) | DE2644879A1 (pl) |
| FR (1) | FR2326974A1 (pl) |
| GB (1) | GB1556244A (pl) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2751163C3 (de) * | 1977-11-16 | 1982-02-25 | Brown, Boveri & Cie Ag, 6800 Mannheim | Verfahren zur Steuerung einer offenen Gallium-Diffusion und Vorrichtung zur Durchführung desselben |
| US4235650A (en) * | 1978-09-05 | 1980-11-25 | General Electric Company | Open tube aluminum diffusion |
| DE3147245C1 (de) * | 1981-11-28 | 1983-03-10 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Diffusionsverfahren zur Herstellung Gallium-dotierter Siliziumschichten mit niedriger Oberflächenkonzentration |
-
1976
- 1976-09-27 CA CA262,073A patent/CA1065498A/en not_active Expired
- 1976-10-05 FR FR7629920A patent/FR2326974A1/fr active Granted
- 1976-10-05 DE DE19762644879 patent/DE2644879A1/de active Pending
- 1976-10-05 GB GB41263/76A patent/GB1556244A/en not_active Expired
- 1976-10-06 BE BE171292A patent/BE847005A/xx unknown
- 1976-10-07 JP JP51119917A patent/JPS5246763A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| BE847005A (fr) | 1977-04-06 |
| JPS5344794B2 (pl) | 1978-12-01 |
| GB1556244A (en) | 1979-11-21 |
| JPS5246763A (en) | 1977-04-13 |
| DE2644879A1 (de) | 1977-04-21 |
| CA1065498A (en) | 1979-10-30 |
| FR2326974A1 (fr) | 1977-05-06 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |