FR2312031B2 - - Google Patents
Info
- Publication number
- FR2312031B2 FR2312031B2 FR7516206A FR7516206A FR2312031B2 FR 2312031 B2 FR2312031 B2 FR 2312031B2 FR 7516206 A FR7516206 A FR 7516206A FR 7516206 A FR7516206 A FR 7516206A FR 2312031 B2 FR2312031 B2 FR 2312031B2
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (11)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7516206A FR2312031A2 (fr) | 1975-05-23 | 1975-05-23 | Procede et dispositif d'analyse elementaire et chimique d'un echantillon par analyse spectrale des energies des electrons secondaires |
| DE19752546053 DE2546053A1 (de) | 1975-01-02 | 1975-10-14 | Verfahren und vorrichtung zur analyse durch spektralanalyse der energie von sekundaerelektronen |
| GB42084/75A GB1530277A (en) | 1975-01-02 | 1975-10-14 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
| US05/641,240 US4034220A (en) | 1975-01-02 | 1975-12-16 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
| CA242,530A CA1048163A (en) | 1975-01-02 | 1975-12-22 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
| IL48721A IL48721A (en) | 1975-01-02 | 1975-12-24 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of thesecondary electrons |
| CH1677775A CH592306A5 (pt) | 1975-01-02 | 1975-12-24 | |
| JP15966475A JPS557179B2 (pt) | 1975-01-02 | 1975-12-29 | |
| SE7514717A SE413556B (sv) | 1975-01-02 | 1975-12-29 | Sett for analys av ett elektronbestralat prov medelst utsenda sekunderelektroner samt anordning for genomforande av settet |
| NL7515242A NL7515242A (nl) | 1975-01-02 | 1975-12-31 | Werkwijze en inrichting voor spectraal-analyse. |
| ES444049A ES444049A1 (es) | 1975-01-02 | 1976-01-02 | Procedimiento y dispositivo de analisis elemental y quimico de una muestra. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7516206A FR2312031A2 (fr) | 1975-05-23 | 1975-05-23 | Procede et dispositif d'analyse elementaire et chimique d'un echantillon par analyse spectrale des energies des electrons secondaires |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2312031A2 FR2312031A2 (fr) | 1976-12-17 |
| FR2312031B2 true FR2312031B2 (pt) | 1978-02-03 |
Family
ID=9155624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7516206A Granted FR2312031A2 (fr) | 1975-01-02 | 1975-05-23 | Procede et dispositif d'analyse elementaire et chimique d'un echantillon par analyse spectrale des energies des electrons secondaires |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2312031A2 (pt) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535516A (en) * | 1966-10-17 | 1970-10-20 | Hitachi Ltd | Electron microscope employing a modulated scanning beam and a phase sensitive detector to improve the signal to noise ratio |
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1975
- 1975-05-23 FR FR7516206A patent/FR2312031A2/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2312031A2 (fr) | 1976-12-17 |