FR2300025A1 - Dispositif pou - Google Patents

Dispositif pou

Info

Publication number
FR2300025A1
FR2300025A1 FR7600863A FR7600863A FR2300025A1 FR 2300025 A1 FR2300025 A1 FR 2300025A1 FR 7600863 A FR7600863 A FR 7600863A FR 7600863 A FR7600863 A FR 7600863A FR 2300025 A1 FR2300025 A1 FR 2300025A1
Authority
FR
France
Prior art keywords
pou
pou device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7600863A
Other languages
English (en)
French (fr)
Other versions
FR2300025B3 (US20030220297A1-20031127-C00009.png
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of FR2300025A1 publication Critical patent/FR2300025A1/fr
Application granted granted Critical
Publication of FR2300025B3 publication Critical patent/FR2300025B3/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
  • Manipulator (AREA)
FR7600863A 1975-02-04 1976-01-14 Dispositif pou Granted FR2300025A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18398575A DD120400A1 (US20030220297A1-20031127-C00009.png) 1975-02-04 1975-02-04

Publications (2)

Publication Number Publication Date
FR2300025A1 true FR2300025A1 (fr) 1976-09-03
FR2300025B3 FR2300025B3 (US20030220297A1-20031127-C00009.png) 1978-10-06

Family

ID=5499041

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7600863A Granted FR2300025A1 (fr) 1975-02-04 1976-01-14 Dispositif pou

Country Status (6)

Country Link
CS (1) CS181534B1 (US20030220297A1-20031127-C00009.png)
DD (1) DD120400A1 (US20030220297A1-20031127-C00009.png)
DE (1) DE2557273A1 (US20030220297A1-20031127-C00009.png)
FR (1) FR2300025A1 (US20030220297A1-20031127-C00009.png)
GB (1) GB1508748A (US20030220297A1-20031127-C00009.png)
SU (1) SU618331A1 (US20030220297A1-20031127-C00009.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus
GB2194500B (en) * 1986-07-04 1991-01-23 Canon Kk A wafer handling apparatus
DE19907210A1 (de) * 1999-02-23 2000-08-31 Krauss Maffei Kunststofftech Vorrichtung zum Transportieren und gleichzeitigen Kühlen von Substraten für Informationsträgerscheiben wie CD, DVD oder dergleichen

Also Published As

Publication number Publication date
FR2300025B3 (US20030220297A1-20031127-C00009.png) 1978-10-06
DE2557273A1 (de) 1976-08-05
SU618331A1 (ru) 1978-08-05
DD120400A1 (US20030220297A1-20031127-C00009.png) 1976-06-12
GB1508748A (en) 1978-04-26
CS181534B1 (en) 1978-03-31

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Legal Events

Date Code Title Description
ST Notification of lapse