FR2297452B1 - - Google Patents
Info
- Publication number
- FR2297452B1 FR2297452B1 FR7500422A FR7500422A FR2297452B1 FR 2297452 B1 FR2297452 B1 FR 2297452B1 FR 7500422 A FR7500422 A FR 7500422A FR 7500422 A FR7500422 A FR 7500422A FR 2297452 B1 FR2297452 B1 FR 2297452B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7500422A FR2297452A1 (fr) | 1975-01-08 | 1975-01-08 | Dispositif de controle de balayage d'une cible par un faisceau de particules |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7500422A FR2297452A1 (fr) | 1975-01-08 | 1975-01-08 | Dispositif de controle de balayage d'une cible par un faisceau de particules |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2297452A1 FR2297452A1 (fr) | 1976-08-06 |
| FR2297452B1 true FR2297452B1 (forum.php) | 1978-07-13 |
Family
ID=9149510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7500422A Granted FR2297452A1 (fr) | 1975-01-08 | 1975-01-08 | Dispositif de controle de balayage d'une cible par un faisceau de particules |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2297452A1 (forum.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL183553C (nl) * | 1978-05-12 | 1988-11-16 | Philips Nv | Inrichting voor het richten van elektrisch geladen deeltjes naar een trefplaats. |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4068123A (en) * | 1973-07-27 | 1978-01-10 | Nihon Denshi Kabushiki Kaisha | Scanning electron microscope |
-
1975
- 1975-01-08 FR FR7500422A patent/FR2297452A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2297452A1 (fr) | 1976-08-06 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |