Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEAfiledCriticalCommissariat a lEnergie Atomique CEA
Priority to FR7500422ApriorityCriticalpatent/FR2297452A1/fr
Publication of FR2297452A1publicationCriticalpatent/FR2297452A1/fr
Application grantedgrantedCritical
Publication of FR2297452B1publicationCriticalpatent/FR2297452B1/fr
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/302—Controlling tubes by external information, e.g. programme control
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Electron Sources, Ion Sources
(AREA)
FR7500422A1975-01-081975-01-08Dispositif de controle de balayage d'une cible par un faisceau de particules
GrantedFR2297452A1
(fr)