FR2290458B1 - - Google Patents
Info
- Publication number
- FR2290458B1 FR2290458B1 FR7437077A FR7437077A FR2290458B1 FR 2290458 B1 FR2290458 B1 FR 2290458B1 FR 7437077 A FR7437077 A FR 7437077A FR 7437077 A FR7437077 A FR 7437077A FR 2290458 B1 FR2290458 B1 FR 2290458B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F265/00—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
- C08F265/04—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00 on to polymers of esters
- C08F265/06—Polymerisation of acrylate or methacrylate esters on to polymers thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7437077A FR2290458A1 (fr) | 1974-11-08 | 1974-11-08 | Resine sensible aux electrons et son application a la realisation de masques de haute resolution pour la fabrication de composants electroniques |
DE19752549638 DE2549638A1 (de) | 1974-11-08 | 1975-11-05 | Elektronenempfindliche harze |
US05/629,543 US4041191A (en) | 1974-11-08 | 1975-11-06 | Resins for use as electron resists |
JP50134612A JPS5170292A (fr) | 1974-11-08 | 1975-11-08 | |
GB46445/75A GB1533264A (en) | 1974-11-08 | 1975-11-10 | Electron-sensitive polymers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7437077A FR2290458A1 (fr) | 1974-11-08 | 1974-11-08 | Resine sensible aux electrons et son application a la realisation de masques de haute resolution pour la fabrication de composants electroniques |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2290458A1 FR2290458A1 (fr) | 1976-06-04 |
FR2290458B1 true FR2290458B1 (fr) | 1978-07-07 |
Family
ID=9144792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7437077A Granted FR2290458A1 (fr) | 1974-11-08 | 1974-11-08 | Resine sensible aux electrons et son application a la realisation de masques de haute resolution pour la fabrication de composants electroniques |
Country Status (5)
Country | Link |
---|---|
US (1) | US4041191A (fr) |
JP (1) | JPS5170292A (fr) |
DE (1) | DE2549638A1 (fr) |
FR (1) | FR2290458A1 (fr) |
GB (1) | GB1533264A (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5471579A (en) * | 1977-11-17 | 1979-06-08 | Matsushita Electric Ind Co Ltd | Electron beam resist |
US4208211A (en) * | 1978-05-23 | 1980-06-17 | Bell Telephone Laboratories, Incorporated | Fabrication based on radiation sensitive resists and related products |
US4262081A (en) * | 1979-11-21 | 1981-04-14 | Bell Telephone Laboratories, Incorporated | Fabrication based on radiation sensitive resists of halo-alkyl styrene polymers |
US4600683A (en) * | 1985-04-22 | 1986-07-15 | International Business Machines Corp. | Cross-linked polyalkenyl phenol based photoresist compositions |
EP0422628A3 (en) * | 1989-10-13 | 1992-02-26 | E.I. Du Pont De Nemours And Company | Photosensitive element |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE465271A (fr) * | 1941-12-31 | 1900-01-01 | ||
US2892712A (en) * | 1954-04-23 | 1959-06-30 | Du Pont | Process for preparing relief images |
GB1002343A (en) * | 1962-09-11 | 1965-08-25 | Canadian Ind | Process for hydroxyalkylating polymers containing carboxyl groups |
US3535137A (en) * | 1967-01-13 | 1970-10-20 | Ibm | Method of fabricating etch resistant masks |
JPS5137320B1 (fr) * | 1967-11-09 | 1976-10-14 | ||
JPS4825050B1 (fr) * | 1968-11-07 | 1973-07-26 | ||
US3799915A (en) * | 1971-08-20 | 1974-03-26 | Western Litho Plate & Supply | Photopolymers |
US3859099A (en) * | 1972-12-22 | 1975-01-07 | Eastman Kodak Co | Positive plate incorporating diazoquinone |
-
1974
- 1974-11-08 FR FR7437077A patent/FR2290458A1/fr active Granted
-
1975
- 1975-11-05 DE DE19752549638 patent/DE2549638A1/de not_active Withdrawn
- 1975-11-06 US US05/629,543 patent/US4041191A/en not_active Expired - Lifetime
- 1975-11-08 JP JP50134612A patent/JPS5170292A/ja active Pending
- 1975-11-10 GB GB46445/75A patent/GB1533264A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5170292A (fr) | 1976-06-17 |
FR2290458A1 (fr) | 1976-06-04 |
US4041191A (en) | 1977-08-09 |
GB1533264A (en) | 1978-11-22 |
DE2549638A1 (de) | 1976-05-20 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |