FR2289956A1 - Dispositif de regulation du courant de faisceau dans un appareil a faisceau de porteurs de charge industriel - Google Patents

Dispositif de regulation du courant de faisceau dans un appareil a faisceau de porteurs de charge industriel

Info

Publication number
FR2289956A1
FR2289956A1 FR7532281A FR7532281A FR2289956A1 FR 2289956 A1 FR2289956 A1 FR 2289956A1 FR 7532281 A FR7532281 A FR 7532281A FR 7532281 A FR7532281 A FR 7532281A FR 2289956 A1 FR2289956 A1 FR 2289956A1
Authority
FR
France
Prior art keywords
load carrier
regulation device
current regulation
industrial load
beam current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7532281A
Other languages
English (en)
French (fr)
Other versions
FR2289956B1 (enExample
Inventor
Alfred Von Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steigerwald Strahltecknik GmbH
Original Assignee
Steigerwald Strahltecknik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19742451366 external-priority patent/DE2451366C3/de
Application filed by Steigerwald Strahltecknik GmbH filed Critical Steigerwald Strahltecknik GmbH
Publication of FR2289956A1 publication Critical patent/FR2289956A1/fr
Application granted granted Critical
Publication of FR2289956B1 publication Critical patent/FR2289956B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/02—Control circuits therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current 
    • G05F1/46—Regulating voltage or current  wherein the variable actually regulated by the final control device is DC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7532281A 1974-10-29 1975-10-22 Dispositif de regulation du courant de faisceau dans un appareil a faisceau de porteurs de charge industriel Granted FR2289956A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742451366 DE2451366C3 (de) 1974-10-29 Einrichtung zum Regeln des Strahlstromes in einem technischen Ladungsträgerstrahlgerät

Publications (2)

Publication Number Publication Date
FR2289956A1 true FR2289956A1 (fr) 1976-05-28
FR2289956B1 FR2289956B1 (enExample) 1980-01-25

Family

ID=5929492

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7532281A Granted FR2289956A1 (fr) 1974-10-29 1975-10-22 Dispositif de regulation du courant de faisceau dans un appareil a faisceau de porteurs de charge industriel

Country Status (4)

Country Link
US (1) US4021636A (enExample)
JP (1) JPS5744225B2 (enExample)
FR (1) FR2289956A1 (enExample)
GB (1) GB1523297A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2844183C2 (de) * 1978-10-10 1984-09-13 Messer Griesheim Gmbh, 6000 Frankfurt Verfahren und Einrichtung zum Einstellen des Kathodenheizstromes in einem technischen Elektronenstrahl-Gerät
FR2464783A1 (fr) * 1979-09-14 1981-03-20 Petroles Cie Francaise Procede de soudage par faisceau d'electrons, a regulation par la puissance absorbee ou par la puissance traversante, ainsi que dispositif de mise en oeuvre de ce procede
US4424448A (en) * 1979-12-26 1984-01-03 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam apparatus
JPS58106750A (ja) * 1981-12-18 1983-06-25 Toshiba Corp フオ−カスイオンビ−ム加工方法
JPS60194519A (ja) * 1984-03-16 1985-10-03 Agency Of Ind Science & Technol マスクレスイオン注入方法
FR2611983A1 (fr) * 1987-04-29 1988-09-09 Vtu Angel Kantchev Circuit d'alimentation electrique pour un evaporateur a faisceau d'electrons
DE3938221A1 (de) * 1989-11-17 1991-05-23 Messer Griesheim Gmbh Verfahren zum schutz einer blende beim erzeugen von elektronenstrahlimpulsen
NZ335453A (en) 1996-12-12 2001-07-27 Prolume Ltd Microelectronic device with microlocations including photodetector for detecting bioluminescence
US7652270B2 (en) * 2007-06-05 2010-01-26 Varian Semiconductor Equipment Associates, Inc. Techniques for ion beam current measurement using a scanning beam current transformer
JP2015174423A (ja) * 2014-03-18 2015-10-05 日本電子株式会社 三次元積層造形装置及び三次元積層造形方法
CN117850169B (zh) * 2023-11-28 2025-01-21 上海集成电路材料研究院有限公司 电子束发射电路以及电子束直写装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547074A (en) * 1967-04-13 1970-12-15 Block Engineering Apparatus for forming microelements
US3479483A (en) * 1968-07-31 1969-11-18 Gen Electric Electron beam welder
DE2153695C3 (de) * 1971-10-28 1974-05-22 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Verfahren und Einrichtung zur Regelung des Strahlstroms in technischen Ladungsträgerstrahlgeräten, insb. Elektronenstrahl-Materialbearbeitungsmaschinen
US3838313A (en) * 1973-05-21 1974-09-24 United Aircraft Corp Beam current regulator for electron beam machines

Also Published As

Publication number Publication date
DE2451366B2 (de) 1977-02-24
FR2289956B1 (enExample) 1980-01-25
GB1523297A (en) 1978-08-31
US4021636A (en) 1977-05-03
JPS5744225B2 (enExample) 1982-09-20
DE2451366A1 (de) 1976-05-06
JPS5166597A (enExample) 1976-06-09

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Legal Events

Date Code Title Description
ST Notification of lapse