FR2263535A1 - - Google Patents

Info

Publication number
FR2263535A1
FR2263535A1 FR7506563A FR7506563A FR2263535A1 FR 2263535 A1 FR2263535 A1 FR 2263535A1 FR 7506563 A FR7506563 A FR 7506563A FR 7506563 A FR7506563 A FR 7506563A FR 2263535 A1 FR2263535 A1 FR 2263535A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7506563A
Other languages
French (fr)
Other versions
FR2263535B1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of FR2263535A1 publication Critical patent/FR2263535A1/fr
Application granted granted Critical
Publication of FR2263535B1 publication Critical patent/FR2263535B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
FR7506563A 1974-03-04 1975-03-03 Expired FR2263535B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2554474A JPS5637543B2 (de) 1974-03-04 1974-03-04

Publications (2)

Publication Number Publication Date
FR2263535A1 true FR2263535A1 (de) 1975-10-03
FR2263535B1 FR2263535B1 (de) 1980-11-14

Family

ID=12168916

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7506563A Expired FR2263535B1 (de) 1974-03-04 1975-03-03

Country Status (7)

Country Link
JP (1) JPS5637543B2 (de)
DE (1) DE2508856A1 (de)
FR (1) FR2263535B1 (de)
GB (1) GB1480705A (de)
IT (1) IT1030259B (de)
NL (1) NL7502561A (de)
SU (1) SU565638A3 (de)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5032643B2 (de) * 1971-10-04 1975-10-23

Also Published As

Publication number Publication date
IT1030259B (it) 1979-03-30
NL7502561A (nl) 1975-09-08
GB1480705A (en) 1977-07-20
DE2508856A1 (de) 1975-09-18
SU565638A3 (ru) 1977-07-15
FR2263535B1 (de) 1980-11-14
JPS5637543B2 (de) 1981-09-01
JPS50120336A (de) 1975-09-20

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Legal Events

Date Code Title Description
ST Notification of lapse