Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Sogev SA
Original Assignee
Leybold Heraeus Sogev SA
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Filing date
Publication date
Application filed by Leybold Heraeus Sogev SAfiledCriticalLeybold Heraeus Sogev SA
Priority to FR7407065ApriorityCriticalpatent/FR2262798A2/fr
Publication of FR2262798A2publicationCriticalpatent/FR2262798A2/fr
Application grantedgrantedCritical
Publication of FR2262798B2publicationCriticalpatent/FR2262798B2/fr
G01L21/30—Vacuum gauges by making use of ionisation effects
G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
Landscapes
Physics & Mathematics
(AREA)
General Physics & Mathematics
(AREA)
Measuring Fluid Pressure
(AREA)
FR7407065A1974-03-011974-03-01Ionisation gauge for measuring of very low pressures - has degassing filament and X-ray protection to increase accuracy
GrantedFR2262798A2
(en)