FR2259383A1 - - Google Patents

Info

Publication number
FR2259383A1
FR2259383A1 FR7402572A FR7402572A FR2259383A1 FR 2259383 A1 FR2259383 A1 FR 2259383A1 FR 7402572 A FR7402572 A FR 7402572A FR 7402572 A FR7402572 A FR 7402572A FR 2259383 A1 FR2259383 A1 FR 2259383A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7402572A
Other languages
French (fr)
Other versions
FR2259383B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7402572A priority Critical patent/FR2259383B1/fr
Priority to DE19752502720 priority patent/DE2502720C2/en
Priority to JP990275A priority patent/JPS6022496B2/en
Priority to GB329475A priority patent/GB1497432A/en
Publication of FR2259383A1 publication Critical patent/FR2259383A1/fr
Priority to US05/771,982 priority patent/US4095112A/en
Application granted granted Critical
Publication of FR2259383B1 publication Critical patent/FR2259383B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
FR7402572A 1974-01-25 1974-01-25 Expired FR2259383B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7402572A FR2259383B1 (en) 1974-01-25 1974-01-25
DE19752502720 DE2502720C2 (en) 1974-01-25 1975-01-23 Method for calibrating a corpuscular optical device and corpuscular optical device for carrying out the method
JP990275A JPS6022496B2 (en) 1974-01-25 1975-01-24 How to calibrate particle optics
GB329475A GB1497432A (en) 1974-01-25 1975-01-24 Apparatus for producing masks
US05/771,982 US4095112A (en) 1974-01-25 1977-02-25 Device for and a method of calibrating electron-optical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7402572A FR2259383B1 (en) 1974-01-25 1974-01-25

Publications (2)

Publication Number Publication Date
FR2259383A1 true FR2259383A1 (en) 1975-08-22
FR2259383B1 FR2259383B1 (en) 1977-06-24

Family

ID=9134012

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7402572A Expired FR2259383B1 (en) 1974-01-25 1974-01-25

Country Status (4)

Country Link
JP (1) JPS6022496B2 (en)
DE (1) DE2502720C2 (en)
FR (1) FR2259383B1 (en)
GB (1) GB1497432A (en)

Also Published As

Publication number Publication date
FR2259383B1 (en) 1977-06-24
JPS6022496B2 (en) 1985-06-03
DE2502720A1 (en) 1975-07-31
JPS50105383A (en) 1975-08-20
DE2502720C2 (en) 1986-05-28
GB1497432A (en) 1978-01-12

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Legal Events

Date Code Title Description
ST Notification of lapse