FR2257995B1 - - Google Patents

Info

Publication number
FR2257995B1
FR2257995B1 FR7335059A FR7335059A FR2257995B1 FR 2257995 B1 FR2257995 B1 FR 2257995B1 FR 7335059 A FR7335059 A FR 7335059A FR 7335059 A FR7335059 A FR 7335059A FR 2257995 B1 FR2257995 B1 FR 2257995B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7335059A
Other versions
FR2257995A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7335059A priority Critical patent/FR2257995A1/fr
Publication of FR2257995A1 publication Critical patent/FR2257995A1/fr
Application granted granted Critical
Publication of FR2257995B1 publication Critical patent/FR2257995B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7335059A 1973-10-01 1973-10-01 Cathodic sputtering appts - where cathodes are mounted on four surfaces of a cubic carrier located above the substrate Granted FR2257995A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7335059A FR2257995A1 (en) 1973-10-01 1973-10-01 Cathodic sputtering appts - where cathodes are mounted on four surfaces of a cubic carrier located above the substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7335059A FR2257995A1 (en) 1973-10-01 1973-10-01 Cathodic sputtering appts - where cathodes are mounted on four surfaces of a cubic carrier located above the substrate

Publications (2)

Publication Number Publication Date
FR2257995A1 FR2257995A1 (en) 1975-08-08
FR2257995B1 true FR2257995B1 (fr) 1977-03-11

Family

ID=9125766

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7335059A Granted FR2257995A1 (en) 1973-10-01 1973-10-01 Cathodic sputtering appts - where cathodes are mounted on four surfaces of a cubic carrier located above the substrate

Country Status (1)

Country Link
FR (1) FR2257995A1 (fr)

Also Published As

Publication number Publication date
FR2257995A1 (en) 1975-08-08

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Legal Events

Date Code Title Description
ST Notification of lapse