FR2257146B3 - - Google Patents
Info
- Publication number
- FR2257146B3 FR2257146B3 FR7442561A FR7442561A FR2257146B3 FR 2257146 B3 FR2257146 B3 FR 2257146B3 FR 7442561 A FR7442561 A FR 7442561A FR 7442561 A FR7442561 A FR 7442561A FR 2257146 B3 FR2257146 B3 FR 2257146B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD17590474A DD109125A1 (ko) | 1974-01-09 | 1974-01-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2257146A1 FR2257146A1 (ko) | 1975-08-01 |
| FR2257146B3 true FR2257146B3 (ko) | 1977-09-23 |
Family
ID=5494267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7442561A Expired FR2257146B3 (ko) | 1974-01-09 | 1974-12-23 |
Country Status (5)
| Country | Link |
|---|---|
| CS (1) | CS177580B1 (ko) |
| DD (1) | DD109125A1 (ko) |
| DE (1) | DE2455817A1 (ko) |
| FR (1) | FR2257146B3 (ko) |
| GB (1) | GB1472099A (ko) |
-
1974
- 1974-01-09 DD DD17590474A patent/DD109125A1/xx unknown
- 1974-11-26 DE DE19742455817 patent/DE2455817A1/de not_active Withdrawn
- 1974-12-23 GB GB5564174A patent/GB1472099A/en not_active Expired
- 1974-12-23 FR FR7442561A patent/FR2257146B3/fr not_active Expired
-
1975
- 1975-01-09 CS CS17875A patent/CS177580B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DD109125A1 (ko) | 1974-10-12 |
| CS177580B1 (ko) | 1977-07-29 |
| DE2455817A1 (de) | 1975-07-17 |
| GB1472099A (en) | 1977-04-27 |
| FR2257146A1 (ko) | 1975-08-01 |