FR2250443A5 - Microphotosetting camera for integrated circuit stencils - has two spaced raster stages and superimposing projection system - Google Patents

Microphotosetting camera for integrated circuit stencils - has two spaced raster stages and superimposing projection system

Info

Publication number
FR2250443A5
FR2250443A5 FR7332672A FR7332672A FR2250443A5 FR 2250443 A5 FR2250443 A5 FR 2250443A5 FR 7332672 A FR7332672 A FR 7332672A FR 7332672 A FR7332672 A FR 7332672A FR 2250443 A5 FR2250443 A5 FR 2250443A5
Authority
FR
France
Prior art keywords
stages
microphotosetting
camera
integrated circuit
projection system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7332672A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GLAZKOV ILYA
Original Assignee
GLAZKOV ILYA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GLAZKOV ILYA filed Critical GLAZKOV ILYA
Priority to FR7332672A priority Critical patent/FR2250443A5/en
Application granted granted Critical
Publication of FR2250443A5 publication Critical patent/FR2250443A5/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Projection-Type Copiers In General (AREA)

Abstract

The two spaced raster stages are positioned on either side of an objective which projects the image of one into the image of the second. The main projecting objective reproduces the superimposed images on the photographic plate. The raster stages are movable along two co-ordinates at right angles to the optical axis by a programmed controlled motor. The rasters form a pattern of numerous translucent polygonal areas. For standard patterns, one stage carries a set of normal topological shapes and the other a rectilinear window. For curved or angled lines the patterns consist of light transmitting circular areas. These are partly superimposed so that a curved line formed by two circle segments is projected. The system is claimed to improve versatility and to allow faster composition of complex large circuits.
FR7332672A 1973-09-11 1973-09-11 Microphotosetting camera for integrated circuit stencils - has two spaced raster stages and superimposing projection system Expired FR2250443A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7332672A FR2250443A5 (en) 1973-09-11 1973-09-11 Microphotosetting camera for integrated circuit stencils - has two spaced raster stages and superimposing projection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7332672A FR2250443A5 (en) 1973-09-11 1973-09-11 Microphotosetting camera for integrated circuit stencils - has two spaced raster stages and superimposing projection system

Publications (1)

Publication Number Publication Date
FR2250443A5 true FR2250443A5 (en) 1975-05-30

Family

ID=9124875

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7332672A Expired FR2250443A5 (en) 1973-09-11 1973-09-11 Microphotosetting camera for integrated circuit stencils - has two spaced raster stages and superimposing projection system

Country Status (1)

Country Link
FR (1) FR2250443A5 (en)

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Legal Events

Date Code Title Description
ST Notification of lapse