FR2224788B1 - - Google Patents

Info

Publication number
FR2224788B1
FR2224788B1 FR7404484A FR7404484A FR2224788B1 FR 2224788 B1 FR2224788 B1 FR 2224788B1 FR 7404484 A FR7404484 A FR 7404484A FR 7404484 A FR7404484 A FR 7404484A FR 2224788 B1 FR2224788 B1 FR 2224788B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7404484A
Other versions
FR2224788A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of FR2224788A1 publication Critical patent/FR2224788A1/fr
Application granted granted Critical
Publication of FR2224788B1 publication Critical patent/FR2224788B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electrophotography Using Other Than Carlson'S Method (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Materials For Photolithography (AREA)
FR7404484A 1973-02-12 1974-02-11 Expired FR2224788B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00332025A US3852771A (en) 1973-02-12 1973-02-12 Electron beam recording process

Publications (2)

Publication Number Publication Date
FR2224788A1 FR2224788A1 (fr) 1974-10-31
FR2224788B1 true FR2224788B1 (fr) 1982-11-05

Family

ID=23296389

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7404484A Expired FR2224788B1 (fr) 1973-02-12 1974-02-11

Country Status (7)

Country Link
US (1) US3852771A (fr)
JP (2) JPS529387B2 (fr)
CA (1) CA1016387A (fr)
DE (1) DE2405831C2 (fr)
FR (1) FR2224788B1 (fr)
GB (1) GB1458126A (fr)
NL (1) NL178101C (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961101A (en) * 1974-09-16 1976-06-01 Rca Corporation Process for improved development of electron-beam-sensitive resist films
US4005437A (en) * 1975-04-18 1977-01-25 Rca Corporation Method of recording information in which the electron beam sensitive material contains 4,4'-bis(3-diazo-3-4-oxo-1-naphthalene sulfonyloxy)benzil
JPS51139402A (en) * 1975-05-24 1976-12-01 Tokyo Ouka Kougiyou Kk Positive photooresist composition
US4289845A (en) * 1978-05-22 1981-09-15 Bell Telephone Laboratories, Inc. Fabrication based on radiation sensitive resists and related products
US4207107A (en) * 1978-08-23 1980-06-10 Rca Corporation Novel ortho-quinone diazide photoresist sensitizers
JPS6055824B2 (ja) * 1979-10-11 1985-12-06 富士通株式会社 感能性高分子材料及びそのパタ−ン形成方法
US4269934A (en) * 1979-10-22 1981-05-26 Corning Glass Works Tin oxide, cadmium chloride doped silver chloride electron beam recording medium
DE3040157A1 (de) * 1980-10-24 1982-06-03 Hoechst Ag, 6000 Frankfurt Lichtemopfindliches gemisch und damit hergestelltes lichtempfindliches kopiermaterial
JPS5796333A (en) * 1980-12-09 1982-06-15 Fujitsu Ltd Production of substrate for exposure of charged beam
US4409319A (en) * 1981-07-15 1983-10-11 International Business Machines Corporation Electron beam exposed positive resist mask process
JPS59167811U (ja) * 1983-04-25 1984-11-10 ミサト株式会社 カ−ブミラ−の着雪防止装置
US4931380A (en) * 1985-07-18 1990-06-05 Microsi, Inc. Pre-exposure method for increased sensitivity in high contrast resist development of positive working diazo ketone photoresist
JP2661671B2 (ja) * 1989-03-20 1997-10-08 株式会社日立製作所 パタン形成材料とそれを用いたパタン形成方法
US5300396A (en) * 1990-11-28 1994-04-05 Hoechst Celanese Corporation Process of making naphthoquinone diazide esters using lactone solvents

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE907739C (de) * 1949-07-23 1954-02-18 Kalle & Co Ag Verfahren zur Herstellung von Kopien, besonders Druckformen, mit Hilfe von Diazoverbindungen und dafuer verwendbares lichtempfindliches Material
US2929708A (en) * 1954-10-26 1960-03-22 Gen Aniline & Film Corp Phosphor screens for color television and method of preparing the same while using diazotype materials
US2897089A (en) * 1956-03-14 1959-07-28 Gen Electric Method of printing color phosphor patterns
US3067349A (en) * 1959-08-06 1962-12-04 Paramount Pictures Corp Method for producing registered color screen cathode-ray tubes
CA774047A (en) * 1963-12-09 1967-12-19 Shipley Company Light-sensitive material and process for the development thereof
US3387975A (en) * 1965-03-10 1968-06-11 Sony Corp Method of making color screen of a cathode ray tube
US3634082A (en) * 1967-07-07 1972-01-11 Shipley Co Light-sensitive naphthoquinone diazide composition containing a polyvinyl ether
US3622322A (en) * 1968-09-11 1971-11-23 Rca Corp Photographic method for producing a metallic pattern with a metal resinate
DE1904764A1 (de) * 1969-01-31 1970-09-10 Algraphy Ltd Positiv arbeitende lichtempfindliche Flachdruckplatten und Verfahren zu ihrer Herstellung
US3661582A (en) * 1970-03-23 1972-05-09 Western Electric Co Additives to positive photoresists which increase the sensitivity thereof

Also Published As

Publication number Publication date
US3852771A (en) 1974-12-03
FR2224788A1 (fr) 1974-10-31
DE2405831A1 (de) 1974-10-10
JPS529387B2 (fr) 1977-03-15
JPS5316290B2 (fr) 1978-05-31
JPS5231742A (en) 1977-03-10
NL178101B (nl) 1985-08-16
NL7401828A (fr) 1974-08-14
CA1016387A (en) 1977-08-30
JPS49118427A (fr) 1974-11-12
NL178101C (nl) 1986-01-16
DE2405831C2 (de) 1986-03-13
GB1458126A (en) 1976-12-08

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Legal Events

Date Code Title Description
ST Notification of lapse