FR2221536B1 - - Google Patents
Info
- Publication number
- FR2221536B1 FR2221536B1 FR7230979A FR7230979A FR2221536B1 FR 2221536 B1 FR2221536 B1 FR 2221536B1 FR 7230979 A FR7230979 A FR 7230979A FR 7230979 A FR7230979 A FR 7230979A FR 2221536 B1 FR2221536 B1 FR 2221536B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7230979A FR2221536A1 (en) | 1972-08-31 | 1972-08-31 | Vacuum depositing thin layers - using appts. which improves homogeneity of deposited layers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7230979A FR2221536A1 (en) | 1972-08-31 | 1972-08-31 | Vacuum depositing thin layers - using appts. which improves homogeneity of deposited layers |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2221536A1 FR2221536A1 (en) | 1974-10-11 |
FR2221536B1 true FR2221536B1 (en) | 1975-06-13 |
Family
ID=9103750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7230979A Granted FR2221536A1 (en) | 1972-08-31 | 1972-08-31 | Vacuum depositing thin layers - using appts. which improves homogeneity of deposited layers |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2221536A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH633729A5 (en) * | 1978-01-04 | 1982-12-31 | Georgy Alexandrovich Kovalsky | Device for coating products |
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1972
- 1972-08-31 FR FR7230979A patent/FR2221536A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2221536A1 (en) | 1974-10-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |