FR2204890A1 - - Google Patents
Info
- Publication number
- FR2204890A1 FR2204890A1 FR7238728A FR7238728A FR2204890A1 FR 2204890 A1 FR2204890 A1 FR 2204890A1 FR 7238728 A FR7238728 A FR 7238728A FR 7238728 A FR7238728 A FR 7238728A FR 2204890 A1 FR2204890 A1 FR 2204890A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7238728A FR2204890B1 (fr) | 1972-11-02 | 1972-11-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7238728A FR2204890B1 (fr) | 1972-11-02 | 1972-11-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2204890A1 true FR2204890A1 (fr) | 1974-05-24 |
FR2204890B1 FR2204890B1 (fr) | 1976-08-20 |
Family
ID=9106518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7238728A Expired FR2204890B1 (fr) | 1972-11-02 | 1972-11-02 |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2204890B1 (fr) |
-
1972
- 1972-11-02 FR FR7238728A patent/FR2204890B1/fr not_active Expired
Non-Patent Citations (1)
Title |
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NEANT * |
Also Published As
Publication number | Publication date |
---|---|
FR2204890B1 (fr) | 1976-08-20 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |