FR2203509A5 - - Google Patents

Info

Publication number
FR2203509A5
FR2203509A5 FR7236547A FR7236547A FR2203509A5 FR 2203509 A5 FR2203509 A5 FR 2203509A5 FR 7236547 A FR7236547 A FR 7236547A FR 7236547 A FR7236547 A FR 7236547A FR 2203509 A5 FR2203509 A5 FR 2203509A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7236547A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7236547A priority Critical patent/FR2203509A5/fr
Application granted granted Critical
Publication of FR2203509A5 publication Critical patent/FR2203509A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
FR7236547A 1972-10-16 1972-10-16 Expired FR2203509A5 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7236547A FR2203509A5 (fr) 1972-10-16 1972-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7236547A FR2203509A5 (fr) 1972-10-16 1972-10-16

Publications (1)

Publication Number Publication Date
FR2203509A5 true FR2203509A5 (fr) 1974-05-10

Family

ID=9105686

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7236547A Expired FR2203509A5 (fr) 1972-10-16 1972-10-16

Country Status (1)

Country Link
FR (1) FR2203509A5 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2499313A1 (fr) * 1981-01-30 1982-08-06 Philips Nv Microscope electronique comportant un detecteur de rayons x
FR2503367A1 (fr) * 1981-03-31 1982-10-08 Ion Tech Ltd Procede et dispositif de preparation d'echantillons pour l'examen au microscope electronique
EP0687897A1 (fr) * 1994-06-14 1995-12-20 Hitachi, Ltd. Procédé de réalisation d'échantillons et appareillage associé
WO1996015436A1 (fr) * 1994-11-14 1996-05-23 Gatan, Inc. Porte-echantillon et appareil pour systeme d'usinage ionique bilateral

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2499313A1 (fr) * 1981-01-30 1982-08-06 Philips Nv Microscope electronique comportant un detecteur de rayons x
FR2503367A1 (fr) * 1981-03-31 1982-10-08 Ion Tech Ltd Procede et dispositif de preparation d'echantillons pour l'examen au microscope electronique
EP0687897A1 (fr) * 1994-06-14 1995-12-20 Hitachi, Ltd. Procédé de réalisation d'échantillons et appareillage associé
US5656811A (en) * 1994-06-14 1997-08-12 Hitachi, Ltd. Method for making specimen and apparatus thereof
WO1996015436A1 (fr) * 1994-11-14 1996-05-23 Gatan, Inc. Porte-echantillon et appareil pour systeme d'usinage ionique bilateral

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Legal Events

Date Code Title Description
ST Notification of lapse