FR2198343B1 - - Google Patents
Info
- Publication number
- FR2198343B1 FR2198343B1 FR7326418A FR7326418A FR2198343B1 FR 2198343 B1 FR2198343 B1 FR 2198343B1 FR 7326418 A FR7326418 A FR 7326418A FR 7326418 A FR7326418 A FR 7326418A FR 2198343 B1 FR2198343 B1 FR 2198343B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/764—Air gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US28430572A | 1972-08-28 | 1972-08-28 | |
US28431072A | 1972-08-28 | 1972-08-28 | |
US28430872A | 1972-08-28 | 1972-08-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2198343A1 FR2198343A1 (hu) | 1974-03-29 |
FR2198343B1 true FR2198343B1 (hu) | 1978-04-21 |
Family
ID=27403458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7326418A Expired FR2198343B1 (hu) | 1972-08-28 | 1973-07-12 |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2198343B1 (hu) |
-
1973
- 1973-07-12 FR FR7326418A patent/FR2198343B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2198343A1 (hu) | 1974-03-29 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |