FR2195354A5 - - Google Patents

Info

Publication number
FR2195354A5
FR2195354A5 FR7317557A FR7317557A FR2195354A5 FR 2195354 A5 FR2195354 A5 FR 2195354A5 FR 7317557 A FR7317557 A FR 7317557A FR 7317557 A FR7317557 A FR 7317557A FR 2195354 A5 FR2195354 A5 FR 2195354A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7317557A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GLEKTROMAT VEB
Original Assignee
GLEKTROMAT VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GLEKTROMAT VEB filed Critical GLEKTROMAT VEB
Application granted granted Critical
Publication of FR2195354A5 publication Critical patent/FR2195354A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR7317557A 1972-08-01 1973-05-15 Expired FR2195354A5 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD16499272A DD99453A1 (enrdf_load_stackoverflow) 1972-08-01 1972-08-01

Publications (1)

Publication Number Publication Date
FR2195354A5 true FR2195354A5 (enrdf_load_stackoverflow) 1974-03-01

Family

ID=5487810

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7317557A Expired FR2195354A5 (enrdf_load_stackoverflow) 1972-08-01 1973-05-15

Country Status (3)

Country Link
DD (1) DD99453A1 (enrdf_load_stackoverflow)
DE (1) DE2310422A1 (enrdf_load_stackoverflow)
FR (1) FR2195354A5 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
DE2310422A1 (de) 1974-02-14
DD99453A1 (enrdf_load_stackoverflow) 1973-08-13

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Legal Events

Date Code Title Description
ST Notification of lapse