FR2190262A5 - - Google Patents

Info

Publication number
FR2190262A5
FR2190262A5 FR7222365A FR7222365A FR2190262A5 FR 2190262 A5 FR2190262 A5 FR 2190262A5 FR 7222365 A FR7222365 A FR 7222365A FR 7222365 A FR7222365 A FR 7222365A FR 2190262 A5 FR2190262 A5 FR 2190262A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7222365A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KORNILOV ANATOL
Original Assignee
KORNILOV ANATOL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KORNILOV ANATOL filed Critical KORNILOV ANATOL
Priority to FR7222365A priority Critical patent/FR2190262A5/fr
Application granted granted Critical
Publication of FR2190262A5 publication Critical patent/FR2190262A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
FR7222365A 1972-06-21 1972-06-21 Expired FR2190262A5 (oth)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7222365A FR2190262A5 (oth) 1972-06-21 1972-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7222365A FR2190262A5 (oth) 1972-06-21 1972-06-21

Publications (1)

Publication Number Publication Date
FR2190262A5 true FR2190262A5 (oth) 1974-01-25

Family

ID=9100554

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7222365A Expired FR2190262A5 (oth) 1972-06-21 1972-06-21

Country Status (1)

Country Link
FR (1) FR2190262A5 (oth)

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Legal Events

Date Code Title Description
ST Notification of lapse