FR2182654A1 - - Google Patents

Info

Publication number
FR2182654A1
FR2182654A1 FR7215628A FR7215628A FR2182654A1 FR 2182654 A1 FR2182654 A1 FR 2182654A1 FR 7215628 A FR7215628 A FR 7215628A FR 7215628 A FR7215628 A FR 7215628A FR 2182654 A1 FR2182654 A1 FR 2182654A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7215628A
Other languages
French (fr)
Other versions
FR2182654B1 (ja
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ERA Patents Ltd
Original Assignee
ERA Patents Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ERA Patents Ltd filed Critical ERA Patents Ltd
Priority to FR7215628A priority Critical patent/FR2182654B1/fr
Publication of FR2182654A1 publication Critical patent/FR2182654A1/fr
Application granted granted Critical
Publication of FR2182654B1 publication Critical patent/FR2182654B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR7215628A 1972-05-03 1972-05-03 Expired FR2182654B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7215628A FR2182654B1 (ja) 1972-05-03 1972-05-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7215628A FR2182654B1 (ja) 1972-05-03 1972-05-03

Publications (2)

Publication Number Publication Date
FR2182654A1 true FR2182654A1 (ja) 1973-12-14
FR2182654B1 FR2182654B1 (ja) 1976-08-06

Family

ID=9097882

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7215628A Expired FR2182654B1 (ja) 1972-05-03 1972-05-03

Country Status (1)

Country Link
FR (1) FR2182654B1 (ja)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
FR2182654B1 (ja) 1976-08-06

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Legal Events

Date Code Title Description
ST Notification of lapse