FR2181165A5 - - Google Patents

Info

Publication number
FR2181165A5
FR2181165A5 FR7213835A FR7213835A FR2181165A5 FR 2181165 A5 FR2181165 A5 FR 2181165A5 FR 7213835 A FR7213835 A FR 7213835A FR 7213835 A FR7213835 A FR 7213835A FR 2181165 A5 FR2181165 A5 FR 2181165A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7213835A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BARBIER BENARD TURENNE
Original Assignee
BARBIER BENARD TURENNE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BARBIER BENARD TURENNE filed Critical BARBIER BENARD TURENNE
Priority to FR7213835A priority Critical patent/FR2181165A5/fr
Application granted granted Critical
Publication of FR2181165A5 publication Critical patent/FR2181165A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
FR7213835A 1972-04-19 1972-04-19 Expired FR2181165A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7213835A FR2181165A5 (en) 1972-04-19 1972-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7213835A FR2181165A5 (en) 1972-04-19 1972-04-19

Publications (1)

Publication Number Publication Date
FR2181165A5 true FR2181165A5 (en) 1973-11-30

Family

ID=9097172

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7213835A Expired FR2181165A5 (en) 1972-04-19 1972-04-19

Country Status (1)

Country Link
FR (1) FR2181165A5 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2704660A1 (en) * 1993-04-27 1994-11-04 Sgs Thomson Microelectronics Masks for a double-sided exposure machine.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2704660A1 (en) * 1993-04-27 1994-11-04 Sgs Thomson Microelectronics Masks for a double-sided exposure machine.
EP0626623A2 (en) * 1993-04-27 1994-11-30 STMicroelectronics S.A. Masks for a double-sided exposing device
EP0626623A3 (en) * 1993-04-27 1995-11-22 Sgs Thomson Microelectronics Masks for a double-sided exposing device.
US5604354A (en) * 1993-04-27 1997-02-18 Sgs-Thomson Microelectronics S.A. Masks for a double-side exposure machine

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Legal Events

Date Code Title Description
ST Notification of lapse