FR2178268A5 - - Google Patents

Info

Publication number
FR2178268A5
FR2178268A5 FR7206748A FR7206748A FR2178268A5 FR 2178268 A5 FR2178268 A5 FR 2178268A5 FR 7206748 A FR7206748 A FR 7206748A FR 7206748 A FR7206748 A FR 7206748A FR 2178268 A5 FR2178268 A5 FR 2178268A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7206748A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OFSER
Original Assignee
OFSER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OFSER filed Critical OFSER
Priority to FR7206748A priority Critical patent/FR2178268A5/fr
Application granted granted Critical
Publication of FR2178268A5 publication Critical patent/FR2178268A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
FR7206748A 1972-02-24 1972-02-24 Expired FR2178268A5 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7206748A FR2178268A5 (fr) 1972-02-24 1972-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7206748A FR2178268A5 (fr) 1972-02-24 1972-02-24

Publications (1)

Publication Number Publication Date
FR2178268A5 true FR2178268A5 (fr) 1973-11-09

Family

ID=9094271

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7206748A Expired FR2178268A5 (fr) 1972-02-24 1972-02-24

Country Status (1)

Country Link
FR (1) FR2178268A5 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2663130A1 (fr) * 1990-06-08 1991-12-13 Nippon Seiko Kk Dispositif d'exposition par projection.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2663130A1 (fr) * 1990-06-08 1991-12-13 Nippon Seiko Kk Dispositif d'exposition par projection.

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Legal Events

Date Code Title Description
ST Notification of lapse