FR2174920A1 - - Google Patents

Info

Publication number
FR2174920A1
FR2174920A1 FR7307501A FR7307501A FR2174920A1 FR 2174920 A1 FR2174920 A1 FR 2174920A1 FR 7307501 A FR7307501 A FR 7307501A FR 7307501 A FR7307501 A FR 7307501A FR 2174920 A1 FR2174920 A1 FR 2174920A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7307501A
Other versions
FR2174920B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of FR2174920A1 publication Critical patent/FR2174920A1/fr
Application granted granted Critical
Publication of FR2174920B1 publication Critical patent/FR2174920B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
FR7307501A 1972-03-04 1973-03-02 Expired FR2174920B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2210505A DE2210505A1 (de) 1972-03-04 1972-03-04 Verfahren zur herstellung einer entspiegelungsschicht auf optischen elementen aus transparentem thermisch empfindlichem material, insbesondere aus kunststoff

Publications (2)

Publication Number Publication Date
FR2174920A1 true FR2174920A1 (fr) 1973-10-19
FR2174920B1 FR2174920B1 (fr) 1976-06-11

Family

ID=5837925

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7307501A Expired FR2174920B1 (fr) 1972-03-04 1973-03-02

Country Status (9)

Country Link
JP (1) JPS514865B2 (fr)
AT (1) AT322236B (fr)
AU (1) AU473789B2 (fr)
CH (1) CH549221A (fr)
DE (1) DE2210505A1 (fr)
ES (1) ES412299A1 (fr)
FR (1) FR2174920B1 (fr)
GB (1) GB1380025A (fr)
IT (1) IT979700B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2293719A1 (fr) 1974-12-05 1976-07-02 Leybold Heraeus Gmbh & Co Kg Procede de preparation de systemes multicouches permettant d'attenuer les reflets, par un effet d'interferences, et les elements optiques prepares par ce procede
FR2365813A1 (fr) * 1976-09-27 1978-04-21 American Optical Corp Procede de preparation d'un revetement anti-reflechissant perfectionne d'une lentille en polymere synthetique

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4026292A (en) * 1974-09-17 1977-05-31 The Procter & Gamble Company Tampon having a mensesphilic foam treated with a liquid lubricant
JPS5226237A (en) * 1975-08-25 1977-02-26 Ulvac Corp Process for treating the surface of a lens made of synthesized plastics
JPS5267647A (en) * 1975-12-03 1977-06-04 Matsushita Electric Ind Co Ltd Optical film
JPS52156643A (en) * 1976-06-23 1977-12-27 Nippon Chemical Ind Optical element of coated synthetic resin substrate
JPS5370836A (en) * 1976-12-07 1978-06-23 Ulvac Corp Method of coating nooreflect material onto plastic lens
DE3332872A1 (de) * 1983-09-12 1985-04-04 Optische Werke G. Rodenstock, 8000 München Reflexionsvermindernder belag fuer ein optisches element aus organischem material
DE4128547A1 (de) * 1991-08-28 1993-03-04 Leybold Ag Verfahren und vorrichtung fuer die herstellung einer entspiegelungsschicht auf linsen
DE102022207068A1 (de) 2022-07-11 2024-01-11 Carl Zeiss Smt Gmbh Linse für eine zum Betrieb im DUV ausgelegte mikrolithographische Projektionsbelichtungsanlage, sowie Verfahren und Anordnung zum Ausbilden einer Antireflexschicht

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356523A (en) * 1964-02-10 1967-12-05 Mc Donnell Douglas Corp Polystyrene film containing an antireflection coating

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356523A (en) * 1964-02-10 1967-12-05 Mc Donnell Douglas Corp Polystyrene film containing an antireflection coating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2293719A1 (fr) 1974-12-05 1976-07-02 Leybold Heraeus Gmbh & Co Kg Procede de preparation de systemes multicouches permettant d'attenuer les reflets, par un effet d'interferences, et les elements optiques prepares par ce procede
FR2365813A1 (fr) * 1976-09-27 1978-04-21 American Optical Corp Procede de preparation d'un revetement anti-reflechissant perfectionne d'une lentille en polymere synthetique

Also Published As

Publication number Publication date
GB1380025A (en) 1975-01-08
AU473789B2 (en) 1976-07-01
DE2210505A1 (de) 1973-09-20
ES412299A1 (es) 1976-01-01
FR2174920B1 (fr) 1976-06-11
JPS48104555A (fr) 1973-12-27
CH549221A (de) 1974-05-15
JPS514865B2 (fr) 1976-02-16
AU5265473A (en) 1974-08-29
IT979700B (it) 1974-09-30
AT322236B (de) 1975-05-12

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Legal Events

Date Code Title Description
ST Notification of lapse