FR2173436A5 - - Google Patents

Info

Publication number
FR2173436A5
FR2173436A5 FR7206290A FR7206290A FR2173436A5 FR 2173436 A5 FR2173436 A5 FR 2173436A5 FR 7206290 A FR7206290 A FR 7206290A FR 7206290 A FR7206290 A FR 7206290A FR 2173436 A5 FR2173436 A5 FR 2173436A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7206290A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cameca SAS
Original Assignee
Cameca SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cameca SAS filed Critical Cameca SAS
Priority to FR7206290A priority Critical patent/FR2173436A5/fr
Priority to DE19732309181 priority patent/DE2309181A1/de
Priority to JP48021429A priority patent/JPS4898891A/ja
Application granted granted Critical
Publication of FR2173436A5 publication Critical patent/FR2173436A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7206290A 1972-02-24 1972-02-24 Expired FR2173436A5 (sk)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR7206290A FR2173436A5 (sk) 1972-02-24 1972-02-24
DE19732309181 DE2309181A1 (de) 1972-02-24 1973-02-23 Mit elektronenstrahlabtastung arbeitende analysevorrichtung
JP48021429A JPS4898891A (sk) 1972-02-24 1973-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7206290A FR2173436A5 (sk) 1972-02-24 1972-02-24

Publications (1)

Publication Number Publication Date
FR2173436A5 true FR2173436A5 (sk) 1973-10-05

Family

ID=9094061

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7206290A Expired FR2173436A5 (sk) 1972-02-24 1972-02-24

Country Status (3)

Country Link
JP (1) JPS4898891A (sk)
DE (1) DE2309181A1 (sk)
FR (1) FR2173436A5 (sk)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2498767A1 (fr) * 1981-01-23 1982-07-30 Cameca Micro-analyseur a sonde electronique comportant un systeme d'observation a double grandissement
FR2596863A1 (fr) * 1986-04-07 1987-10-09 Centre Nat Rech Scient Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique
EP0254128A2 (de) * 1986-07-25 1988-01-27 Siemens Aktiengesellschaft Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe
US4810077A (en) * 1986-02-13 1989-03-07 Spectra-Tech, Inc. Grazing angle microscope
US4829178A (en) * 1987-03-30 1989-05-09 Vg Instruments Group Limited Apparatus for surface analysis
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
WO2020225453A2 (en) 2019-05-09 2020-11-12 Attolight AG Cathodoluminescence electron microscope
EP3783344A1 (en) 2019-08-20 2021-02-24 Attolight AG Accurate wavelength calibration in cathodoluminescence sem
WO2022118294A1 (en) 2020-12-04 2022-06-09 Attolight AG Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements
WO2022157647A1 (en) 2021-01-19 2022-07-28 Attolight AG COST EFFECTIVE PROBING IN HIGH VOLUME MANUFACTURE OF μLEDS
US11782001B2 (en) 2020-12-04 2023-10-10 Attolight AG Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6354057U (sk) * 1986-09-27 1988-04-11

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4440475A (en) * 1981-01-23 1984-04-03 Compagnie D'applications Mecaniques A L'electronique, Au Cinema Et A L'atomistique (C.A.M.E.C.A.) Electron probe microanalyzer comprising an observation system having double magnification
FR2498767A1 (fr) * 1981-01-23 1982-07-30 Cameca Micro-analyseur a sonde electronique comportant un systeme d'observation a double grandissement
US4810077A (en) * 1986-02-13 1989-03-07 Spectra-Tech, Inc. Grazing angle microscope
FR2596863A1 (fr) * 1986-04-07 1987-10-09 Centre Nat Rech Scient Dispositif de microscopie analytique, propre a former a la fois une sonde raman et une sonde electronique
EP0254128A3 (de) * 1986-07-25 1990-01-03 Siemens Aktiengesellschaft Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe
EP0254128A2 (de) * 1986-07-25 1988-01-27 Siemens Aktiengesellschaft Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe
US4829178A (en) * 1987-03-30 1989-05-09 Vg Instruments Group Limited Apparatus for surface analysis
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
WO2020225453A2 (en) 2019-05-09 2020-11-12 Attolight AG Cathodoluminescence electron microscope
EP3783344A1 (en) 2019-08-20 2021-02-24 Attolight AG Accurate wavelength calibration in cathodoluminescence sem
US11227743B2 (en) 2019-08-20 2022-01-18 Attolight AG Accurate wavelength calibration in cathodoluminescence SEM
WO2022118294A1 (en) 2020-12-04 2022-06-09 Attolight AG Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements
US11782001B2 (en) 2020-12-04 2023-10-10 Attolight AG Dislocation type and density discrimination in semiconductor materials using cathodoluminescence measurements
WO2022157647A1 (en) 2021-01-19 2022-07-28 Attolight AG COST EFFECTIVE PROBING IN HIGH VOLUME MANUFACTURE OF μLEDS
US12014896B2 (en) 2021-01-19 2024-06-18 Attolight AG Cost effective probing in high volume manufacture of micro LEDs

Also Published As

Publication number Publication date
DE2309181A1 (de) 1973-10-11
JPS4898891A (sk) 1973-12-14

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Legal Events

Date Code Title Description
ST Notification of lapse