FR2169768A1 - - Google Patents

Info

Publication number
FR2169768A1
FR2169768A1 FR7234765A FR7234765A FR2169768A1 FR 2169768 A1 FR2169768 A1 FR 2169768A1 FR 7234765 A FR7234765 A FR 7234765A FR 7234765 A FR7234765 A FR 7234765A FR 2169768 A1 FR2169768 A1 FR 2169768A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7234765A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kodak Pathe SA
Original Assignee
Kodak Pathe SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kodak Pathe SA filed Critical Kodak Pathe SA
Priority to FR7234765A priority Critical patent/FR2169768A1/fr
Publication of FR2169768A1 publication Critical patent/FR2169768A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
FR7234765A 1972-10-02 1972-10-02 Withdrawn FR2169768A1 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7234765A FR2169768A1 (xx) 1972-10-02 1972-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7234765A FR2169768A1 (xx) 1972-10-02 1972-10-02

Publications (1)

Publication Number Publication Date
FR2169768A1 true FR2169768A1 (xx) 1973-09-14

Family

ID=9105031

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7234765A Withdrawn FR2169768A1 (xx) 1972-10-02 1972-10-02

Country Status (1)

Country Link
FR (1) FR2169768A1 (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0653683A1 (en) * 1993-11-12 1995-05-17 Semiconductor Systems, Inc. Oscillatory chuck method and apparatus for coating flat substrates

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0653683A1 (en) * 1993-11-12 1995-05-17 Semiconductor Systems, Inc. Oscillatory chuck method and apparatus for coating flat substrates
US5798140A (en) * 1993-11-12 1998-08-25 Semiconductor Systems, Inc. Oscillatory chuck method and apparatus for coating flat substrates

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Legal Events

Date Code Title Description
ST Notification of lapse