FR2169071A1 - - Google Patents

Info

Publication number
FR2169071A1
FR2169071A1 FR7301515A FR7301515A FR2169071A1 FR 2169071 A1 FR2169071 A1 FR 2169071A1 FR 7301515 A FR7301515 A FR 7301515A FR 7301515 A FR7301515 A FR 7301515A FR 2169071 A1 FR2169071 A1 FR 2169071A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7301515A
Other languages
French (fr)
Other versions
FR2169071B3 (cs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of FR2169071A1 publication Critical patent/FR2169071A1/fr
Application granted granted Critical
Publication of FR2169071B3 publication Critical patent/FR2169071B3/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7301515A 1972-01-24 1973-01-17 Expired FR2169071B3 (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH102772 1972-01-24

Publications (2)

Publication Number Publication Date
FR2169071A1 true FR2169071A1 (cs) 1973-09-07
FR2169071B3 FR2169071B3 (cs) 1976-01-16

Family

ID=4200740

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7301515A Expired FR2169071B3 (cs) 1972-01-24 1973-01-17

Country Status (4)

Country Link
CH (1) CH547549A (cs)
DE (1) DE2263478A1 (cs)
FR (1) FR2169071B3 (cs)
NL (1) NL7203301A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE505807T1 (de) * 2005-02-10 2011-04-15 Thailand Res Fund Ionenquelle mit hoher stromdichte

Also Published As

Publication number Publication date
DE2263478A1 (de) 1973-08-02
CH547549A (de) 1974-03-29
NL7203301A (cs) 1973-07-26
FR2169071B3 (cs) 1976-01-16

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Legal Events

Date Code Title Description
ST Notification of lapse