FR2165844B1 - - Google Patents

Info

Publication number
FR2165844B1
FR2165844B1 FR7225169A FR7225169A FR2165844B1 FR 2165844 B1 FR2165844 B1 FR 2165844B1 FR 7225169 A FR7225169 A FR 7225169A FR 7225169 A FR7225169 A FR 7225169A FR 2165844 B1 FR2165844 B1 FR 2165844B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7225169A
Other languages
French (fr)
Other versions
FR2165844A1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Industrie SA
Original Assignee
Air Industrie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Industrie SA filed Critical Air Industrie SA
Priority to FR7225169A priority Critical patent/FR2165844B1/fr
Publication of FR2165844A1 publication Critical patent/FR2165844A1/fr
Application granted granted Critical
Publication of FR2165844B1 publication Critical patent/FR2165844B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR7225169A 1972-07-04 1972-07-04 Expired FR2165844B1 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7225169A FR2165844B1 (enExample) 1972-07-04 1972-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7225169A FR2165844B1 (enExample) 1972-07-04 1972-07-04

Publications (2)

Publication Number Publication Date
FR2165844A1 FR2165844A1 (enExample) 1973-08-10
FR2165844B1 true FR2165844B1 (enExample) 1976-02-13

Family

ID=9101707

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7225169A Expired FR2165844B1 (enExample) 1972-07-04 1972-07-04

Country Status (1)

Country Link
FR (1) FR2165844B1 (enExample)

Also Published As

Publication number Publication date
FR2165844A1 (enExample) 1973-08-10

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Legal Events

Date Code Title Description
ST Notification of lapse