Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Air Industrie SA
Original Assignee
Air Industrie SA
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Publication date
Application filed by Air Industrie SAfiledCriticalAir Industrie SA
Priority to FR7225169ApriorityCriticalpatent/FR2165844B1/fr
Publication of FR2165844A1publicationCriticalpatent/FR2165844A1/fr
Application grantedgrantedCritical
Publication of FR2165844B1publicationCriticalpatent/FR2165844B1/fr
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation