FR2161798A1 - - Google Patents

Info

Publication number
FR2161798A1
FR2161798A1 FR7142844A FR7142844A FR2161798A1 FR 2161798 A1 FR2161798 A1 FR 2161798A1 FR 7142844 A FR7142844 A FR 7142844A FR 7142844 A FR7142844 A FR 7142844A FR 2161798 A1 FR2161798 A1 FR 2161798A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7142844A
Other languages
French (fr)
Other versions
FR2161798B1 (cs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7142844A priority Critical patent/FR2161798B1/fr
Publication of FR2161798A1 publication Critical patent/FR2161798A1/fr
Application granted granted Critical
Publication of FR2161798B1 publication Critical patent/FR2161798B1/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10Reaction chambers; Selection of materials therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR7142844A 1971-11-30 1971-11-30 Expired FR2161798B1 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7142844A FR2161798B1 (cs) 1971-11-30 1971-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7142844A FR2161798B1 (cs) 1971-11-30 1971-11-30

Publications (2)

Publication Number Publication Date
FR2161798A1 true FR2161798A1 (cs) 1973-07-13
FR2161798B1 FR2161798B1 (cs) 1974-09-27

Family

ID=9086633

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7142844A Expired FR2161798B1 (cs) 1971-11-30 1971-11-30

Country Status (1)

Country Link
FR (1) FR2161798B1 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409791A1 (fr) * 1977-11-25 1979-06-22 Silicium Semiconducteur Ssc Appareils de dopage par diffusion de tranches semi-conductrices
FR2479278A1 (fr) * 1980-03-26 1981-10-02 Loic Henry Procede de diffusion d'impuretes dans un semiconducteur et dispositif pour la mise en oeuvre de ce procede

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3139362A (en) * 1961-12-29 1964-06-30 Bell Telephone Labor Inc Method of manufacturing semiconductive devices

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3139362A (en) * 1961-12-29 1964-06-30 Bell Telephone Labor Inc Method of manufacturing semiconductive devices

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409791A1 (fr) * 1977-11-25 1979-06-22 Silicium Semiconducteur Ssc Appareils de dopage par diffusion de tranches semi-conductrices
FR2479278A1 (fr) * 1980-03-26 1981-10-02 Loic Henry Procede de diffusion d'impuretes dans un semiconducteur et dispositif pour la mise en oeuvre de ce procede

Also Published As

Publication number Publication date
FR2161798B1 (cs) 1974-09-27

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Legal Events

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