FR2161109B1 - - Google Patents

Info

Publication number
FR2161109B1
FR2161109B1 FR7241974A FR7241974A FR2161109B1 FR 2161109 B1 FR2161109 B1 FR 2161109B1 FR 7241974 A FR7241974 A FR 7241974A FR 7241974 A FR7241974 A FR 7241974A FR 2161109 B1 FR2161109 B1 FR 2161109B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7241974A
Other languages
French (fr)
Other versions
FR2161109A1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LEAD
Original Assignee
LEAD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LEAD filed Critical LEAD
Publication of FR2161109A1 publication Critical patent/FR2161109A1/fr
Application granted granted Critical
Publication of FR2161109B1 publication Critical patent/FR2161109B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B7/31—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FR7241974A 1971-11-24 1972-11-24 Expired FR2161109B1 (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2158320A DE2158320B2 (de) 1971-11-24 1971-11-24 Vorrichtung zur berührungsfreien relativen Abstandsmessung

Publications (2)

Publication Number Publication Date
FR2161109A1 FR2161109A1 (OSRAM) 1973-07-06
FR2161109B1 true FR2161109B1 (OSRAM) 1979-10-12

Family

ID=5826026

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7241974A Expired FR2161109B1 (OSRAM) 1971-11-24 1972-11-24

Country Status (3)

Country Link
US (1) US3815020A (OSRAM)
DE (1) DE2158320B2 (OSRAM)
FR (1) FR2161109B1 (OSRAM)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2386811A1 (fr) * 1977-04-06 1978-11-03 Elf Aquitaine Detecteur de niveau de separation entre deux liquides
US4190797A (en) * 1978-03-31 1980-02-26 Gould Inc. Capacitive gauging system utilizing a low internal capacitance, high impedance amplifier means
JPS5735320A (en) * 1980-08-11 1982-02-25 Telmec Co Ltd Structure of mask for baking of semiconductor integrated circuit
FR2519137A1 (fr) * 1981-12-24 1983-07-01 Europ Agence Spatiale Detecteur de position a deux axes pour dispositif a suspension magnetique
GB8322002D0 (en) * 1983-08-16 1983-09-21 Atomic Energy Authority Uk Gauging apparatus
US5021740A (en) * 1989-03-07 1991-06-04 The Boeing Company Method and apparatus for measuring the distance between a body and a capacitance probe
US5070302A (en) * 1989-09-05 1991-12-03 Eastman Kodak Company Capacitance probe for measuring a width of a clearance between parts
US5315259A (en) * 1992-05-26 1994-05-24 Universities Research Association, Inc. Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere
CA2127135A1 (en) * 1994-06-30 1995-12-31 Bryan P. Mclaughlin Apparatus and method of determining the best position for inner and outer members in a rotary machine
GB9712848D0 (en) * 1997-06-18 1997-08-20 Queensgate Instr Ltd Capacitance micrometer
US7289230B2 (en) 2002-02-06 2007-10-30 Cyberoptics Semiconductors, Inc. Wireless substrate-like sensor
US20050224902A1 (en) * 2002-02-06 2005-10-13 Ramsey Craig C Wireless substrate-like sensor
WO2007012502A1 (de) 2005-07-29 2007-02-01 Gerd Reime Verfahren und vorrichtung zur entfernungsmessung mittels kapazitiven oder induktiven sensoren
US7893697B2 (en) * 2006-02-21 2011-02-22 Cyberoptics Semiconductor, Inc. Capacitive distance sensing in semiconductor processing tools
CN101410690B (zh) * 2006-02-21 2011-11-23 赛博光学半导体公司 半导体加工工具中的电容性距离感测
CN101517701B (zh) 2006-09-29 2011-08-10 赛博光学半导体公司 衬底形的粒子传感器
NL1033148C2 (nl) * 2006-12-29 2008-07-01 Univ Delft Tech Elektrische meetinrichting, werkwijze en computer programma product.
US20080246493A1 (en) * 2007-04-05 2008-10-09 Gardner Delrae H Semiconductor Processing System With Integrated Showerhead Distance Measuring Device
DE202007008439U1 (de) * 2007-06-16 2008-10-23 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Hallstadt Auswerteschaltung für eine Messkapazität
US20090015268A1 (en) * 2007-07-13 2009-01-15 Gardner Delrae H Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE567800A (OSRAM) * 1957-10-21
US3096591A (en) * 1960-06-29 1963-07-09 Jr Edward F Higgins Radio frequency leveling device
CH387752A (de) * 1960-07-21 1965-02-15 Ibm Verfahren und Einrichtung zur Regelung einer durch elektrische Schwingungen veränderliche Frequenz dargestellten Grösse eines Vorganges
US3140608A (en) * 1960-12-16 1964-07-14 Brooks Equipment Corp Liquid level gauge
US3408566A (en) * 1964-03-17 1968-10-29 Industrial Nucleonics Corp Phase shift method and apparatus for mass-independent measurement of the properties of dielectric materials
US3688190A (en) * 1970-09-25 1972-08-29 Beckman Instruments Inc Differential capacitance circuitry for differential pressure measuring instruments

Also Published As

Publication number Publication date
US3815020A (en) 1974-06-04
DE2158320B2 (de) 1980-04-10
FR2161109A1 (OSRAM) 1973-07-06
DE2158320C3 (OSRAM) 1980-12-11
DE2158320A1 (de) 1973-05-30

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Legal Events

Date Code Title Description
ST Notification of lapse