FR2160805A1 - Ionic pulverization plant - with collector polarizing voltage measuring circuit - Google Patents

Ionic pulverization plant - with collector polarizing voltage measuring circuit

Info

Publication number
FR2160805A1
FR2160805A1 FR7231817A FR7231817A FR2160805A1 FR 2160805 A1 FR2160805 A1 FR 2160805A1 FR 7231817 A FR7231817 A FR 7231817A FR 7231817 A FR7231817 A FR 7231817A FR 2160805 A1 FR2160805 A1 FR 2160805A1
Authority
FR
France
Prior art keywords
collector
fed
voltage measuring
output
sawtooth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7231817A
Other languages
English (en)
French (fr)
Other versions
FR2160805B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHRISTENSEN ORIA
Original Assignee
CHRISTENSEN ORIA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHRISTENSEN ORIA filed Critical CHRISTENSEN ORIA
Priority to FR7231817A priority Critical patent/FR2160805A1/fr
Publication of FR2160805A1 publication Critical patent/FR2160805A1/fr
Application granted granted Critical
Publication of FR2160805B1 publication Critical patent/FR2160805B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR7231817A 1972-09-07 1972-09-07 Ionic pulverization plant - with collector polarizing voltage measuring circuit Granted FR2160805A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7231817A FR2160805A1 (en) 1972-09-07 1972-09-07 Ionic pulverization plant - with collector polarizing voltage measuring circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7231817A FR2160805A1 (en) 1972-09-07 1972-09-07 Ionic pulverization plant - with collector polarizing voltage measuring circuit

Publications (2)

Publication Number Publication Date
FR2160805A1 true FR2160805A1 (en) 1973-07-06
FR2160805B1 FR2160805B1 (enExample) 1975-03-07

Family

ID=9103992

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7231817A Granted FR2160805A1 (en) 1972-09-07 1972-09-07 Ionic pulverization plant - with collector polarizing voltage measuring circuit

Country Status (1)

Country Link
FR (1) FR2160805A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031704A3 (en) * 1979-12-26 1982-08-04 Western Electric Company, Incorporated Improvements in or relating to reactive plasma processes and apparatus therefor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031704A3 (en) * 1979-12-26 1982-08-04 Western Electric Company, Incorporated Improvements in or relating to reactive plasma processes and apparatus therefor

Also Published As

Publication number Publication date
FR2160805B1 (enExample) 1975-03-07

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