FR2156978A5 - - Google Patents

Info

Publication number
FR2156978A5
FR2156978A5 FR7136701A FR7136701A FR2156978A5 FR 2156978 A5 FR2156978 A5 FR 2156978A5 FR 7136701 A FR7136701 A FR 7136701A FR 7136701 A FR7136701 A FR 7136701A FR 2156978 A5 FR2156978 A5 FR 2156978A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7136701A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7136701A priority Critical patent/FR2156978A5/fr
Priority to US296594A priority patent/US3890535A/en
Priority to DE2249999A priority patent/DE2249999A1/de
Priority to GB4708572A priority patent/GB1411428A/en
Priority to NL7213791A priority patent/NL7213791A/xx
Application granted granted Critical
Publication of FR2156978A5 publication Critical patent/FR2156978A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FR7136701A 1971-10-13 1971-10-13 Expired FR2156978A5 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7136701A FR2156978A5 (ja) 1971-10-13 1971-10-13
US296594A US3890535A (en) 1971-10-13 1972-10-11 Ion sources
DE2249999A DE2249999A1 (de) 1971-10-13 1972-10-12 Ionenquelle
GB4708572A GB1411428A (en) 1971-10-13 1972-10-12 Ion sources
NL7213791A NL7213791A (ja) 1971-10-13 1972-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7136701A FR2156978A5 (ja) 1971-10-13 1971-10-13

Publications (1)

Publication Number Publication Date
FR2156978A5 true FR2156978A5 (ja) 1973-06-01

Family

ID=9084273

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7136701A Expired FR2156978A5 (ja) 1971-10-13 1971-10-13

Country Status (5)

Country Link
US (1) US3890535A (ja)
DE (1) DE2249999A1 (ja)
FR (1) FR2156978A5 (ja)
GB (1) GB1411428A (ja)
NL (1) NL7213791A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2550681A1 (fr) * 1983-08-12 1985-02-15 Centre Nat Rech Scient Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4045677A (en) * 1976-06-11 1977-08-30 Cornell Research Foundation, Inc. Intense ion beam generator
US4301391A (en) * 1979-04-26 1981-11-17 Hughes Aircraft Company Dual discharge plasma device
USRE34806E (en) * 1980-11-25 1994-12-13 Celestech, Inc. Magnetoplasmadynamic processor, applications thereof and methods
JPS58225537A (ja) * 1982-06-25 1983-12-27 Hitachi Ltd イオン源装置
US4529571A (en) * 1982-10-27 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Single-ring magnetic cusp low gas pressure ion source
US4587430A (en) * 1983-02-10 1986-05-06 Mission Research Corporation Ion implantation source and device
US4620095A (en) * 1984-01-18 1986-10-28 Miziolek Andrzej W Ion neutralization resonance emission elemental detector
US5838012A (en) * 1997-03-19 1998-11-17 Genus, Inc. Charge exchange cell
US7838850B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285354A (ja) * 1961-12-11
US3238414A (en) * 1965-07-28 1966-03-01 George G Kelley High output duoplasmatron-type ion source
FR1585902A (ja) * 1968-04-09 1970-02-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2550681A1 (fr) * 1983-08-12 1985-02-15 Centre Nat Rech Scient Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs
US4782235A (en) * 1983-08-12 1988-11-01 Centre National De La Recherche Scientifique Source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams

Also Published As

Publication number Publication date
US3890535A (en) 1975-06-17
DE2249999A1 (de) 1973-04-19
NL7213791A (ja) 1973-04-17
GB1411428A (en) 1975-10-22

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Legal Events

Date Code Title Description
ST Notification of lapse