Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
  • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
  • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
  • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
  • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
  • H10W20/00—Interconnections in chips, wafers or substrates
  • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Applications Claiming Priority (1)

Publications (2)

Family

ID=5821635

Family Applications (1)

Country Status (5)

• 1971
  • 1971-10-06 DE DE19712149898 patent/DE2149898A1/de not_active Ceased
• 1972
  • 1972-10-03 IT IT30006/72A patent/IT968555B/it active
  • 1972-10-04 NL NL7213432A patent/NL7213432A/xx unknown
  • 1972-10-04 FR FR7235130A patent/FR2156016B1/fr not_active Expired
  • 1972-10-05 GB GB4585372A patent/GB1366748A/en not_active Expired

Non-Patent Citations (1)

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