FR2153241B1 - - Google Patents

Info

Publication number
FR2153241B1
FR2153241B1 FR7230718A FR7230718A FR2153241B1 FR 2153241 B1 FR2153241 B1 FR 2153241B1 FR 7230718 A FR7230718 A FR 7230718A FR 7230718 A FR7230718 A FR 7230718A FR 2153241 B1 FR2153241 B1 FR 2153241B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7230718A
Other languages
French (fr)
Other versions
FR2153241A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of FR2153241A1 publication Critical patent/FR2153241A1/fr
Application granted granted Critical
Publication of FR2153241B1 publication Critical patent/FR2153241B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7230718A 1971-09-21 1972-08-30 Expired FR2153241B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1382271A CH542772A (en) 1971-09-21 1971-09-21 Device for transporting substrates to be coated through a vacuum system

Publications (2)

Publication Number Publication Date
FR2153241A1 FR2153241A1 (en) 1973-05-04
FR2153241B1 true FR2153241B1 (en) 1976-08-13

Family

ID=4395631

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7230718A Expired FR2153241B1 (en) 1971-09-21 1972-08-30

Country Status (6)

Country Link
US (1) US3787312A (en)
CH (1) CH542772A (en)
DE (1) DE2242916C3 (en)
FR (1) FR2153241B1 (en)
GB (1) GB1360934A (en)
NL (1) NL150167B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385153A (en) * 1977-01-06 1978-07-27 Mitsubishi Electric Corp Forming method for light reflective metallic film and heat absorbent material film on face panel inside and its unit
DE2950997C2 (en) * 1979-12-18 1986-10-09 Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa Device for coating
JPS6037188B2 (en) * 1981-08-27 1985-08-24 三菱マテリアル株式会社 sputtering equipment
US4423701A (en) * 1982-03-29 1984-01-03 Energy Conversion Devices, Inc. Glow discharge deposition apparatus including a non-horizontally disposed cathode
US4389295A (en) * 1982-05-06 1983-06-21 Gte Products Corporation Thin film phosphor sputtering process
US4576830A (en) * 1984-11-05 1986-03-18 Chronar Corp. Deposition of materials
DE3623970A1 (en) * 1986-07-16 1988-01-28 Leybold Heraeus Gmbh & Co Kg TRANSPORTATION DEVICE WITH ROLLER SYSTEMS FOR VACUUM COATING SYSTEMS
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
JP3416910B2 (en) * 1991-04-04 2003-06-16 シーゲイト テクノロジィ リミテッド ライアビリティ カンパニー High throughput sputtering apparatus and method
DE4139549A1 (en) * 1991-11-30 1993-06-03 Leybold Ag DEVICE FOR THE TRANSPORT OF SUBSTRATES
US5565838A (en) * 1992-05-28 1996-10-15 Avx Corporation Varistors with sputtered terminations
EP0572151A3 (en) * 1992-05-28 1995-01-18 Avx Corp Varistors with sputtered terminations and a method of applying sputtered teminations to varistors and the like.
CA2137471A1 (en) 1992-06-26 1994-01-06 Tugrul Yasar Transport system for wafer processing line
DE4301189C2 (en) * 1993-01-19 2000-12-14 Leybold Ag Device for coating substrates
DE4428136A1 (en) * 1994-08-09 1996-02-15 Leybold Ag In-line vacuum coating plant,
DE19630290C2 (en) * 1996-07-26 2000-08-10 Audi Ag System for the surface treatment of objects, in particular vehicle bodies
WO2003095695A2 (en) * 2002-05-06 2003-11-20 Guardian Industries Corp. Sputter coating apparatus including ion beam source(s), and corresponding method
KR20100045124A (en) * 2008-10-23 2010-05-03 삼성전자주식회사 Sputter tray moving system
CN102061449B (en) * 2009-11-16 2013-06-05 鸿富锦精密工业（深圳）有限公司 Vacuum coater
DE102010017896A1 (en) * 2010-04-21 2011-10-27 Ald Vacuum Technologies Gmbh Apparatus and method for coating substrates according to the EB / PVD method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1758531A (en) * 1926-10-22 1930-05-13 Elektrodenzerstaubung M B H Ge Vacuum dispersion coating process
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
US3288700A (en) * 1963-10-23 1966-11-29 Northern Electric Co Sputtering apparatus including a folded flexible conveyor

Also Published As

Publication number Publication date
DE2242916B2 (en) 1974-10-03
DE2242916C3 (en) 1975-05-15
US3787312A (en) 1974-01-22
NL7116671A (en) 1973-03-23
CH542772A (en) 1973-10-15
FR2153241A1 (en) 1973-05-04
GB1360934A (en) 1974-07-24
DE2242916A1 (en) 1973-03-22
NL150167B (en) 1976-07-15

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Legal Events

Date Code Title Description
ST Notification of lapse