|
US4771430A
(en)
*
|
1985-07-24 |
1988-09-13 |
Princeton University |
Enhancement of soft X-ray lasing action with thin blade radiators
|
|
US4664769A
(en)
*
|
1985-10-28 |
1987-05-12 |
International Business Machines Corporation |
Photoelectric enhanced plasma glow discharge system and method including radiation means
|
|
US4933813A
(en)
*
|
1986-04-14 |
1990-06-12 |
Berger Daniel S |
Sunlight simulator
|
|
US4917447A
(en)
*
|
1989-02-06 |
1990-04-17 |
The United States Of America As Represented By The Department Of Energy |
Extreme ultraviolet reflector
|
|
US5014291A
(en)
*
|
1989-04-13 |
1991-05-07 |
Nicola Castellano |
Device for amplification of x-rays
|
|
US4939744A
(en)
*
|
1989-11-15 |
1990-07-03 |
United States Of America As Represented By The Secretary Of Commerce |
Method and apparatus for producing a photopumped VUV laser in MO6+ ion-containing plasma
|
|
US4977572A
(en)
*
|
1990-03-29 |
1990-12-11 |
The United States Of America As Represented By The Department Of Energy |
Resonantly photo-pumped nickel-like erbium X-ray laser
|
|
US5569916A
(en)
*
|
1992-07-09 |
1996-10-29 |
Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry |
Electron spectroscopy apparatus
|
|
US6097740A
(en)
*
|
1998-09-29 |
2000-08-01 |
Palathingal; Jose Chakkoru |
Method and apparatus of producing coherent high-frequency electromagnetic radiation by interacting beams of ions and electrons
|
|
US7491954B2
(en)
*
|
2006-10-13 |
2009-02-17 |
Cymer, Inc. |
Drive laser delivery systems for EUV light source
|
|
WO2011060805A1
(en)
*
|
2009-11-20 |
2011-05-26 |
Max-Planck-Gesellschaft zur Förderung der Wissenschaften e. V. |
Method and laser device for generating pulsed high power laser light
|
|
KR101748461B1
(ko)
|
2010-02-09 |
2017-06-16 |
에너제틱 테크놀로지 아이엔씨. |
레이저 구동 광원
|
|
JP6283374B2
(ja)
|
2013-01-16 |
2018-02-21 |
マツクス−プランク−ゲゼルシヤフト ツール フエルデルング デル ヴイツセンシヤフテン エー フアウＭＡＸ−ＰＬＡＮＣＫ−ＧＥＳＥＬＬＳＣＨＡＦＴ ＺＵＲ ＦＯｅＲＤＥＲＵＮＧ ＤＥＲ ＷＩＳＳＥＮＳＣＨＡＦＴＥＮ Ｅ．Ｖ． |
非球面ミラーを含む増強共振器
|
|
IL234729B
(en)
|
2013-09-20 |
2021-02-28 |
Asml Netherlands Bv |
A light source operated by a laser and a method using a mode mixer
|
|
IL234727B
(en)
|
2013-09-20 |
2020-09-30 |
Asml Netherlands Bv |
A light source operated by a laser in an optical system corrected for deviations and the method of manufacturing the system as mentioned
|
|
US9741553B2
(en)
|
2014-05-15 |
2017-08-22 |
Excelitas Technologies Corp. |
Elliptical and dual parabolic laser driven sealed beam lamps
|
|
JP6707467B2
(ja)
|
2014-05-15 |
2020-06-10 |
エクセリタス テクノロジーズ コーポレイション |
レーザ駆動シールドビームランプ
|
|
US10186416B2
(en)
|
2014-05-15 |
2019-01-22 |
Excelitas Technologies Corp. |
Apparatus and a method for operating a variable pressure sealed beam lamp
|
|
US10008378B2
(en)
|
2015-05-14 |
2018-06-26 |
Excelitas Technologies Corp. |
Laser driven sealed beam lamp with improved stability
|
|
US9576785B2
(en)
|
2015-05-14 |
2017-02-21 |
Excelitas Technologies Corp. |
Electrodeless single CW laser driven xenon lamp
|
|
US10057973B2
(en)
|
2015-05-14 |
2018-08-21 |
Excelitas Technologies Corp. |
Electrodeless single low power CW laser driven plasma lamp
|
|
US10109473B1
(en)
|
2018-01-26 |
2018-10-23 |
Excelitas Technologies Corp. |
Mechanically sealed tube for laser sustained plasma lamp and production method for same
|
|
US11587781B2
(en)
|
2021-05-24 |
2023-02-21 |
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|
|
US12165856B2
(en)
|
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|
|
US12144072B2
(en)
|
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All-optical laser-driven light source with electrodeless ignition
|
|
US12156322B2
(en)
|
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|