FR2138908A1 - - Google Patents

Info

Publication number
FR2138908A1
FR2138908A1 FR7218316A FR7218316A FR2138908A1 FR 2138908 A1 FR2138908 A1 FR 2138908A1 FR 7218316 A FR7218316 A FR 7218316A FR 7218316 A FR7218316 A FR 7218316A FR 2138908 A1 FR2138908 A1 FR 2138908A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7218316A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SACHER RUDOLF GmbH
Original Assignee
SACHER RUDOLF GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SACHER RUDOLF GmbH filed Critical SACHER RUDOLF GmbH
Publication of FR2138908A1 publication Critical patent/FR2138908A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/14Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
    • H10P32/1404Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase using predeposition followed by drive-in of impurities into the semiconductor surface, e.g. predeposition from a gaseous phase
    • H10P32/1406Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase using predeposition followed by drive-in of impurities into the semiconductor surface, e.g. predeposition from a gaseous phase by ion implantation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
FR7218316A 1971-05-24 1972-05-23 Withdrawn FR2138908A1 (ref)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT448271 1971-05-24

Publications (1)

Publication Number Publication Date
FR2138908A1 true FR2138908A1 (ref) 1973-01-05

Family

ID=3564616

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7218316A Withdrawn FR2138908A1 (ref) 1971-05-24 1972-05-23

Country Status (2)

Country Link
DE (1) DE2224658A1 (ref)
FR (1) FR2138908A1 (ref)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031231A (ja) * 1983-07-29 1985-02-18 Toshiba Corp 半導体基体の製造方法

Also Published As

Publication number Publication date
DE2224658A1 (de) 1972-12-07

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Legal Events

Date Code Title Description
ST Notification of lapse